Development of a Slot-Excited Planar Microwave Discharge Device for Uniform Plasma Processing

2004 ◽  
Vol 32 (1) ◽  
pp. 101-107 ◽  
Author(s):  
Y. Yasaka ◽  
N. Ishii ◽  
T. Yamamoto ◽  
M. Ando ◽  
M. Takahashi
Keyword(s):  
Microwave Discharge ◽  
Plasma Processing ◽  
Discharge Device ◽  
Uniform Plasma

Design and fabrication of a resonant-cavity electrode microwave discharge device and its performance in argon and xenon plasma

2019 ◽  
Vol 90 (10) ◽  
pp. 103502
Author(s):  
Zhongkai Zhang ◽  
Yu Liu ◽  
Jinxiang Cao ◽  
Pengcheng Yu ◽  
Xiao Zhang ◽  
...  
Keyword(s):  
Microwave Discharge ◽  
Resonant Cavity ◽  
Discharge Device

Wide-area uniform plasma processing in an ECR plasma

1996 ◽  
Vol 5 (2) ◽  
pp. 299-304 ◽  
Author(s):  
Shin Hiyama ◽  
Takashi Ono ◽  
Satoru Iizuka ◽  
Noriyoshi Sato
Keyword(s):  
Plasma Processing ◽  
Wide Area ◽  
Ecr Plasma ◽  
Uniform Plasma

Production of Large-Diameter Uniform Plasma in mTorr Range Using Microwave Discharge

1999 ◽  
Vol 38 (Part 1, No. 7B) ◽  
pp. 4309-4312 ◽  
Author(s):  
Yasuyoshi Yasaka ◽  
Daiki Nozaki ◽  
Kazuya Koga ◽  
Makoto Ando ◽  
Tetsuya Yamamoto ◽  
...  
Keyword(s):  
Microwave Discharge ◽  
Large Diameter ◽  
Uniform Plasma

On uniform plasma generation for the large area plasma processing in intermediate pressures

2015 ◽  
Vol 117 (15) ◽  
pp. 153302 ◽  
Author(s):  
Hyun Jun Kim ◽  
Hye-Ju Hwang ◽  
Dong Hwan Kim ◽  
Jeong Hee Cho ◽  
Hee Sun Chae ◽  
...  
Keyword(s):  
Plasma Processing ◽  
Large Area ◽  
Plasma Generation ◽  
Uniform Plasma

Microstructural characterization of plasma-processed Ti-Al metal matrix composites

1989 ◽  
Vol 47 ◽  
pp. 552-553
Author(s):  
M. G. Burke ◽  
M. N. Gungor ◽  
M. A. Burke
Keyword(s):  
High Temperature ◽  
Titanium Aluminide ◽  
Plasma Processing ◽  
Microstructural Characterization ◽  
High Temperature Strength ◽  
Matrix Composites ◽  
Intermetallic Matrix ◽  
Long Time ◽  
Strength And Stiffness ◽  
Intermetallic Matrix Composites

Intermetallic matrix composites are candidates for ultrahigh temperature service when light weight and high temperature strength and stiffness are required. Recent efforts to produce intermetallic matrix composites have focused on the titanium aluminide (TiAl) system with various ceramic reinforcements. In order to optimize the composition and processing of these composites it is necessary to evaluate the range of structures that can be produced in these materials and to identify the characteristics of the optimum structures. Normally, TiAl materials are difficult to process and, thus, examination of a suitable range of structures would not be feasible. However, plasma processing offers a novel method for producing composites from difficult to process component materials. By melting one or more of the component materials in a plasma and controlling deposition onto a cooled substrate, a range of structures can be produced and the method is highly suited to examining experimental composite systems. Moreover, because plasma processing involves rapid melting and very rapid cooling can be induced in the deposited composite, it is expected that processing method can avoid some of the problems, such as interfacial degradation, that are associated with the relatively long time, high temperature exposures that are induced by conventional processing methods.

Ultrathin Insulator Films with Atomically Smooth Surfaces Using Plasma Processing

2008 ◽  
Author(s):  
Venkateswara Bommisetty ◽  
Rojan L. Karmacharya ◽  
Suravi Shrestha ◽  
David Galipeau
Keyword(s):  
Plasma Processing ◽  
Smooth Surfaces

Development of a Miniature Microwave Discharge Neutralizer for Miniature Ion Engines

2014 ◽  
Vol 62 (4) ◽  
pp. 123-128 ◽  
Author(s):  
Naoji YAMAMOTO ◽  
Yoshiaki HIRAOKA ◽  
Hideki NAKASHIMA
Keyword(s):  
Microwave Discharge
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