Characterization of Ge ions implantation in Sb2Te3 thin films for high speed phase change memory application
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2018 ◽
Vol 29
(19)
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pp. 16172-16177
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2008 ◽
Vol 155
(2)
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pp. D137
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2014 ◽
Vol 127
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pp. 77-80
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2015 ◽
Vol 653
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pp. 334-337
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