scholarly journals The longitudinal plasma modes in mDM-plasma system

AIP Advances ◽  
2021 ◽  
Vol 11 (6) ◽  
pp. 065013
Author(s):  
Y. Z. Xiong ◽  
H. Chen ◽  
S. Q. Liu
2017 ◽  
Vol 65 (3) ◽  
pp. 117-122
Author(s):  
Asato WADA ◽  
Hiroshi MAEDA ◽  
Takahiro SHINDO ◽  
Hiroki WATANABE ◽  
Haruki TAKEGAHARA

Author(s):  
Ramachandra Chitakudige ◽  
Sarat Kumar Dash ◽  
A.M. Khan

Abstract Detection of both Insufficient Buried Contact (IBC) and cell-to-cell short defects is quite a challenging task for failure analysis in submicron Dynamic Random Access Memory (DRAM) devices. A combination of a well-controlled wet etch and high selectivity poly silicon etch is a key requirement in the deprocessing of DRAM for detection of these types of failures. High selectivity poly silicon etch methods have been reported using complicated system such as ECR (Electron Cyclotron Resonance) Plasma system. The fact that these systems use hazardous gases like Cl2, HBr, and SF6 motivates the search for safer alternative deprocessing chemistries. The present work describes high selectivity poly silicon etch using simple Reactive Ion Etch (RIE) plasma system using less hazardous gases such as CF4, O2 etc. A combination of controlled wet etch and high selectivity poly silicon etch have been used to detect both IBC and cell-to-cell shorts in submicron DRAMs.


2021 ◽  
Vol 28 (8) ◽  
pp. 083501
Author(s):  
J. Moritz ◽  
S. Heuraux ◽  
E. Gravier ◽  
M. Lesur ◽  
F. Brochard ◽  
...  

2013 ◽  
Vol 79 (4) ◽  
pp. 405-411 ◽  
Author(s):  
SERGEY I. POPEL ◽  
LEV M. ZELENYI

AbstractFrom the Apollo era of exploration, it was discovered that sunlight was scattered at the terminators giving rise to “horizon glow” and “streamers” above the lunar surface. Subsequent investigations have shown that the sunlight was most likely scattered by electrostatically charged dust grains originating from the surface. A renaissance is being observed currently in investigations of the Moon. The Luna-Glob and Luna-Resource missions (the latter jointly with India) are being prepared in Russia. Some of these missions will include investigations of lunar dust. Here we discuss the future experimental investigations of lunar dust within the missions of Luna-Glob and Luna-Resource. We consider the dusty plasma system over the lunar surface and determine the maximum height of dust rise. We describe mechanisms of formation of the dusty plasma system over the Moon and its main properties, determine distributions of electrons and dust over the lunar surface, and show a possibility of rising dust particles over the surface of the illuminated part of the Moon in the entire range of lunar latitudes. Finally, we discuss the effect of condensation of micrometeoriod substance during the expansion of the impact plume and show that this effect is important from the viewpoint of explanation of dust particle rise to high altitudes in addition to the dusty plasma effects.


2015 ◽  
Vol 44 (4) ◽  
pp. 495-496 ◽  
Author(s):  
Yoshiteru Mizukoshi ◽  
Ryusuke Katagiri ◽  
Hiroshi Horibe ◽  
Shin-ichi Hatanaka ◽  
Masahiro Asano ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document