Characterization of an RF excited broad beam ion source operating with inert gases
1990 ◽
Vol 8
(3)
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pp. 2945-2949
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Keyword(s):
1998 ◽
Vol 7
(3)
◽
pp. 252-267
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Keyword(s):
1988 ◽
Vol 6
(1)
◽
pp. 284
◽
1996 ◽
Vol 7
(6)
◽
pp. 944-948
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2009 ◽
Vol 20
(9)
◽
pp. 1684-1687
◽
2019 ◽
Vol 61
(6)
◽
pp. 065003
◽
Keyword(s):
2016 ◽
Vol 9
(4)
◽
pp. 1449-1460
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