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Metalorganic chemical vapor deposition of α-Ga2O3 and α-(AlxGa1−x)2O3 thin films on m-plane sapphire substrates
APL Materials
◽
10.1063/5.0065087
◽
2021
◽
Vol 9
(10)
◽
pp. 101109
Author(s):
A F M Anhar Uddin Bhuiyan
◽
Zixuan Feng
◽
Hsien-Lien Huang
◽
Lingyu Meng
◽
Jinwoo Hwang
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Sapphire Substrates
◽
Metalorganic Chemical
Download Full-text
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Crystalline quality and surface morphology of (100) CeO2 thin films grown on sapphire substrates by solid source metalorganic chemical vapor deposition
Journal of Crystal Growth
◽
10.1016/0022-0248(95)00253-7
◽
1995
◽
Vol 156
(3)
◽
pp. 227-234
◽
Cited By ~ 29
Author(s):
Z. Lu
◽
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◽
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◽
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◽
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◽
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◽
Chemical Vapor Deposition
◽
Surface Morphology
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
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◽
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◽
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Characterization of MgxZn1−xO thin films grown on sapphire substrates by metalorganic chemical vapor deposition
Thin Solid Films
◽
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◽
2011
◽
Vol 519
(6)
◽
pp. 1966-1970
◽
Cited By ~ 12
Author(s):
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◽
D.S. Wuu
◽
P.R. Lin
◽
T.N. Chen
◽
R.H. Horng
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Sapphire Substrates
◽
Metalorganic Chemical
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Rutherford backscattering and optical studies for ZnO thin films on sapphire substrates grown by metalorganic chemical vapor deposition
10.1117/12.859109
◽
2010
◽
Author(s):
Yee Ling Chung
◽
Lin Li
◽
Shude Yao
◽
Zhe Chuan Feng
◽
William E. Fenwick
◽
...
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Rutherford Backscattering
◽
Zno Thin Films
◽
Optical Studies
◽
Sapphire Substrates
◽
Metalorganic Chemical
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Surface, structural and optical properties of AlN thin films grown on different face sapphire substrates by metalorganic chemical vapor deposition
Applied Surface Science
◽
10.1016/j.apsusc.2018.07.138
◽
2018
◽
Vol 458
◽
pp. 972-977
◽
Cited By ~ 5
Author(s):
Yao Li
◽
Chi Zhang
◽
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◽
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◽
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Keyword(s):
Thin Films
◽
Optical Properties
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Structural And Optical Properties
◽
Sapphire Substrates
◽
Metalorganic Chemical
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Effect of Substrates and Thermal Treatments on Metalorganic Chemical Vapor Deposition-Grown Sb2Te3 Thin Films
Crystal Growth & Design
◽
10.1021/acs.cgd.1c00508
◽
2021
◽
Author(s):
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◽
Raimondo Cecchini
◽
Claudia Wiemer
◽
Emanuele Longo
◽
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◽
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◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
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◽
Metalorganic Chemical
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Fabrication of aluminum oxide thin films by a low‐pressure metalorganic chemical vapor deposition technique
Applied Physics Letters
◽
10.1063/1.108838
◽
1993
◽
Vol 62
(7)
◽
pp. 681-683
◽
Cited By ~ 34
Author(s):
J. S. Kim
◽
H. A. Marzouk
◽
P. J. Reucroft
◽
J. D. Robertson
◽
C. E. Hamrin
Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Aluminum Oxide
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Deposition Technique
◽
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◽
Vapor Deposition Technique
◽
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Heteroepitaxial AlN growth 4on c-plane sapphire substrates by ammonia-free high temperature metalorganic chemical vapor deposition
Journal of Crystal Growth
◽
10.1016/j.jcrysgro.2021.126496
◽
2022
◽
pp. 126496
Author(s):
Xu-Qiang Shen
◽
Kazutoshi Kojima
Keyword(s):
Chemical Vapor Deposition
◽
High Temperature
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Sapphire Substrates
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Metalorganic Chemical
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Low-pressure Metalorganic Chemical Vapor Deposition and Characterization of YBa2Cu3O7−x Thin Films
Superconductivity and Applications
◽
10.1007/978-1-4684-7565-4_11
◽
1990
◽
pp. 127-138
Author(s):
P. Zawadzki
◽
G. S. Tompa
◽
P. Norris
◽
D. W. Noh
◽
B. Gallois
◽
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Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Low Pressure
◽
Metalorganic Chemical
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Epitaxial thin films of YBa2Cu3O7−xon LaAlO3substrates deposited by plasma‐enhanced metalorganic chemical vapor deposition
Applied Physics Letters
◽
10.1063/1.104973
◽
1991
◽
Vol 58
(2)
◽
pp. 185-187
◽
Cited By ~ 36
Author(s):
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◽
J. Zhao
◽
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◽
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◽
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Keyword(s):
Thin Films
◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Epitaxial Thin Films
◽
Metalorganic Chemical
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Mechanistic study of metalorganic chemical vapor deposition of (Ba,Sr)TiO3 thin films
Journal of Applied Physics
◽
10.1063/1.373005
◽
2000
◽
Vol 87
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◽
pp. 7430-7437
◽
Cited By ~ 13
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◽
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◽
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◽
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◽
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◽
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◽
Chemical Vapor Deposition
◽
Vapor Deposition
◽
Metalorganic Chemical Vapor Deposition
◽
Chemical Vapor
◽
Mechanistic Study
◽
Metalorganic Chemical
Download Full-text
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