Characteristics of Pb(Zr, Ti)O3 Thin Films Deposited on Pt(Si) at Low Substrate Temperature by Using Ba(Mg1/3Ta2/3)O3 as Buffer Layer

2004 ◽  
Vol 67 (1) ◽  
pp. 3-12
Author(s):  
YING-HAO CHU ◽  
SU-JIEN LIN ◽  
KUO-SHUNG LIU ◽  
I-NAN LIN
2008 ◽  
Vol 569 ◽  
pp. 137-140
Author(s):  
Ji Eon Yoon ◽  
Won Hyo Cha ◽  
Dong Hyun Hwang ◽  
Chul Su Lee ◽  
In Seok Lee ◽  
...  

The SBT(SrBi2Ta2O9) thin films with Bi2O3 buffer layer were deposited on Pt/Ti/SiO2/Si substrate by R.F. magnetron sputtering method in order to improve the ferroelectric characteristics. In SBT thin films, the deficiency of bismuth due to its volatility during the process results in an obvious non stoichiometry of the films and the presence of secondary phases. Bi2O3 buffer layer was found to be effective to achieve lower temperature crystallization and improve ferroelectric properties of SBT thin films. Ferroelectric properties and crystallinities of SBT thin films with various substrate temperature of Bi2O3 buffer layer were observed, using X-Ray Diffraction (XRD), Precision LC (Radient Technologies. Inc.) and GDS (glow discharge spectrometer).


2013 ◽  
Vol 361-363 ◽  
pp. 370-373 ◽  
Author(s):  
Jian Wei Ma ◽  
Ya Rui Song ◽  
Gang Xu ◽  
Lei Miao

Vanadium oxide thin films have been deposited on glass and ZnO-coated glass substrates by reactive RF-magnetron sputtering deposition at different substrate temperature. The introduction of ZnO buffer layer could increase the transmittance. The buffer layer ZnO could lead to the increase of the crystallinity quality of VO2 films and substrate temperature could be decreased to 100°C for the obtaining of polycrystalline VO2 structure. The structure of VO2/ZnO/glass is considered to be potentially applicable to smart windows of high total energy efficiency in architectures or automobiles.


2013 ◽  
Vol 734-737 ◽  
pp. 2568-2571
Author(s):  
Jian Wei Ma ◽  
Ya Rui Song ◽  
Gang Xu ◽  
Lei Miao

Vanadium oxide thin films have been deposited on glass and ZnO-coated glass substrates by reactive RF-magnetron sputtering deposition at different substrate temperature. The introduction of ZnO buffer layer could increase the transmittance. The buffer layer ZnO could lead to the increase of the crystallinity quality of VO2 films and substrate temperature could be decreased to 100°C for the obtaining of polycrystalline VO2 structure. The structure of VO2/ZnO/glass is considered to be potentially applicable to ‘‘smart windows’’ of high total energy efficiency in architectures or automobiles. .


AIP Advances ◽  
2021 ◽  
Vol 11 (2) ◽  
pp. 025106
Author(s):  
Xinjun Wang ◽  
Sergiy Krylyuk ◽  
Daniel Josell ◽  
Delin Zhang ◽  
Deyuan Lyu ◽  
...  

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