Dynamics and control of thin film growth process from a multicomponent gas

1997 ◽  
Vol 30 (20) ◽  
pp. 2794-2797 ◽  
Author(s):  
A L Fradkov ◽  
P Yu Guzenko ◽  
S A Kukushkin ◽  
A V Osipov
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Thin Film Growth ◽  
Multicomponent Gas ◽  
Dynamics And Control ◽  
And Control

scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2002 ◽  
Vol 62 (4) ◽  
pp. 1251-1280 ◽  
Author(s):  
G. M. Kepler ◽  
H. T. Banks ◽  
H. T. Tran ◽  
S. C. Beeler
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control

Novel understanding of the YBa2Cu3O7–x thin film growth

2002 ◽  
Vol 17 (2) ◽  
pp. 302-305 ◽  
Author(s):  
D. X. Huang ◽  
Y. Nakamura ◽  
Y. Yamada ◽  
I. Hirabayshi
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Substrate Surface ◽  
Thin Film Growth ◽  
Competitive Growth ◽  
Ybco Thin Film ◽  
Local Surface ◽  
Cross Sectional ◽  
Oriented Film

By combining the cross-sectional observation of the randomly oriented film areas and the analyses of the film microstructural influence by the substrate-surface morphology, we achieved a novel understanding of the YBa2Cu3O7–x (YBCO) thin film growth process, which leads to an explanation of different microstructures formed in YBCO thin films. Selective and competitive growth of YBa2Cu3O7–x and Ba–Cu–O/Cu–O was found to occur in the whole film growth process depending on the local surface roughness in which the interfacial energy played a controlling role.

An SDRE-Based Approach for HIV Feedback Control and Control of Thin Film Growth in a CVD Reactor

2011 ◽  
Vol 44 (1) ◽  
pp. 9601-9606 ◽  
Author(s):  
H.T. Banks ◽  
S.C. Beeler ◽  
Hee-Dae Kwon ◽  
B.M. Lewis ◽  
J.A. Toivanen ◽  
...  
Keyword(s):  
Thin Film ◽  
Feedback Control ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control
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