scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2000 ◽  
Author(s):  
S. C. Beeler ◽  
G. M. Kepler ◽  
H. T. Tran ◽  
H. T. Banks
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control

scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2002 ◽  
Vol 62 (4) ◽  
pp. 1251-1280 ◽  
Author(s):  
G. M. Kepler ◽  
H. T. Banks ◽  
H. T. Tran ◽  
S. C. Beeler
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control

Multiscale Modeling and Control of Porous Thin Film Growth

2010 ◽  
pp. 13-1-13-17
Author(s):  
Gangshi Hu ◽  
Xinyu Zhang ◽  
Gerassimos Orkoulas ◽  
Panagiotis Christofides
Keyword(s):  
Thin Film ◽  
Multiscale Modeling ◽  
Film Growth ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Porous Thin Film ◽  
And Control

Dynamics and control of thin film growth process from a multicomponent gas

1997 ◽  
Vol 30 (20) ◽  
pp. 2794-2797 ◽  
Author(s):  
A L Fradkov ◽  
P Yu Guzenko ◽  
S A Kukushkin ◽  
A V Osipov
Keyword(s):  
Thin Film ◽  
Growth Process ◽  
Film Growth ◽  
Thin Film Growth ◽  
Multicomponent Gas ◽  
Dynamics And Control ◽  
And Control

Reduced Order Modeling and Control of an Electrohydraulic Valve System

2004 ◽  
Vol 37 (22) ◽  
pp. 167-172 ◽  
Author(s):  
Jean-Pierre Hathout ◽  
Jasim Ahmed ◽  
Aleksandar Kojić
Keyword(s):  
Reduced Order Modeling ◽  
Modeling And Control ◽  
Reduced Order ◽  
Valve System ◽  
Electrohydraulic Valve ◽  
And Control
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