In-situ thin film growth/etch measurement and control by laser light reflectance analysis

1999 ◽  
Vol 150 (1-4) ◽  
pp. 95-100 ◽  
Author(s):  
Brahm Pal Singh
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Laser Light ◽  
Thin Film Growth ◽  
Light Reflectance ◽  
Reflectance Analysis ◽  
And Control ◽  
Measurement And Control

The measurement and control of ionization of the depositing flux during thin film growth

Vacuum ◽  
2002 ◽  
Vol 69 (1-3) ◽  
pp. 53-62 ◽  
Author(s):  
Z.H Barber ◽  
C Christou ◽  
K.-F Chiu ◽  
A Garg
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
And Control ◽  
Measurement And Control

In situ work function study of oxidation and thin film growth on clean surfaces

1999 ◽  
Vol 433-435 ◽  
pp. 770-774 ◽  
Author(s):  
I.D Baikie ◽  
U Petermann ◽  
B Lägel
Keyword(s):  
Thin Film ◽  
Work Function ◽  
Film Growth ◽  
Thin Film Growth ◽  
Function Study

Soft x-ray spectrometer for in situ monitoring of thin-film growth

1994 ◽  
Author(s):  
Per Skytt ◽  
Carl J. Englund ◽  
Nial Wassdahl ◽  
Derrick C. Mancini ◽  
Joseph Nordgren
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Thin Film Growth ◽  
In Situ Monitoring ◽  
X Ray

scholarly journals Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

2002 ◽  
Vol 62 (4) ◽  
pp. 1251-1280 ◽  
Author(s):  
G. M. Kepler ◽  
H. T. Banks ◽  
H. T. Tran ◽  
S. C. Beeler
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Reduced Order Modeling ◽  
Thin Film Growth ◽  
Modeling And Control ◽  
Reduced Order ◽  
And Control
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