Identification of halogen containing radicals in silicon etching plasmas and density measurement by UV broad band absorption spectroscopy
2004 ◽
Vol 37
(14)
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pp. 1954-1964
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Keyword(s):
2012 ◽
Vol 45
(12)
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pp. 125203
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2006 ◽
Vol 33
(3)
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pp. 205-212
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2016 ◽
Vol 25
(3)
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pp. 035019
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Keyword(s):
2013 ◽
Vol 11
(3)
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pp. 232-238
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2011 ◽
Vol 44
(12)
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pp. 122001
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Keyword(s):
2008 ◽
Vol 492
(2)
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pp. 585-592
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