Identification of halogen containing radicals in silicon etching plasmas and density measurement by UV broad band absorption spectroscopy

2004 ◽  
Vol 37 (14) ◽  
pp. 1954-1964 ◽  
Author(s):  
Martin Kogelschatz ◽  
Gilles Cunge ◽  
Nader Sadeghi
Author(s):  
Ralf Methling ◽  
Nicolas Götte ◽  
Dirk Uhrlandt

Molecule radiation can be used as a tool to study colder regions in switching arc plasmas like arc fringes in contact to walls and ranges around current zero (CZ). This is demonstrated in the present study for the first time for the case of ablation-dominated high–current arcs as key elements of self–blast circuit breakers. The arc in a model circuit breaker (MCB) in CO2 with and an arc in a long nozzle under ambient conditions with peak currents between 5 and 10 kA were studied by emission and absorption spectroscopy in the visible spectral range. The nozzle material was polytetrafluoroethylene (PTFE) in both cases. Imaging spectroscopy was carried out either with high-speed cameras or with intensified CCD cameras. A pulsed high-intensity Xe lamp was applied as background radiator for the broad-band absorption spectroscopy. Emission of Swan bands from carbon dimers was observed at the edge of nozzles only or across the whole nozzle radius with highest intensity in the arc center, depending on current and nozzle geometry. Furthermore, absorption of C2 Swan bands and CuF bands were found with the arc plasma serving as background radiator. After CZ, only CuF was detected in absorption experiments.


1981 ◽  
Vol 35 (2) ◽  
pp. 176-181 ◽  
Author(s):  
Frederic G. Dewalt ◽  
John R. Amend ◽  
Ray Woodriff

A simple system which corrects for both broad band absorption and broad band emission in thermally atomized atomic absorption spectroscopy is presented in this article.


2016 ◽  
Vol 25 (3) ◽  
pp. 035019 ◽  
Author(s):  
Daniil Marinov ◽  
Mickaël Foucher ◽  
Ewen Campbell ◽  
Mark Brouard ◽  
Pascal Chabert ◽  
...  

Energies ◽  
2020 ◽  
Vol 13 (18) ◽  
pp. 4720
Author(s):  
Ralf Methling ◽  
Nicolas Götte ◽  
Dirk Uhrlandt

Molecule radiation can be used as a tool to study colder regions in switching arc plasmas like arc fringes in contact to walls and ranges around current zero (CZ). This is demonstrated in the present study for the first time for the case of ablation-dominated high-current arcs as key elements of self-blast circuit breakers. The arc in a model circuit breaker (MCB) in CO2 with and an arc in a long nozzle under ambient conditions with peak currents between 5 and 10 kA were studied by emission and absorption spectroscopy in the visible spectral range. The nozzle material was polytetrafluoroethylene (PTFE) in both cases. Imaging spectroscopy was carried out either with high-speed cameras or with intensified CCD cameras. A pulsed high-intensity Xe lamp was applied as a background radiator for the broad-band absorption spectroscopy. Emission of Swan bands from carbon dimers was observed at the edge of nozzles only or across the whole nozzle radius with highest intensity in the arc center, depending on current and nozzle geometry. Furthermore, absorption of C2 Swan bands and CuF bands were found with the arc plasma serving as background radiator. After CZ, only CuF was detected in absorption experiments.


2008 ◽  
Vol 492 (2) ◽  
pp. 585-592 ◽  
Author(s):  
J.-M. Désert ◽  
A. Vidal-Madjar ◽  
A. Lecavelier des Etangs ◽  
D. Sing ◽  
D. Ehrenreich ◽  
...  

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