Assessment of Electron Energy Distributions in Discharges by Optical Emission Spectroscopy

Mapping Intimacies ◽

10.1063/1.2821299 ◽

2007 ◽

Author(s):

Dirk Dodt ◽

Andreas Dinklage ◽

Rainer Fischer ◽

Roland Preuss ◽

Kevin H. Knuth ◽

...

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distributions

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Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/37/19/r01 ◽

2004 ◽

Vol 37 (19) ◽

pp. R217-R236 ◽

Author(s):

V M Donnelly

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Plasma Electron ◽

Energy Distributions

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Spatially resolved electron temperatures, species concentrations, and electron energy distributions in inductively coupled chlorine plasmas, measured by trace-rare gases optical emission spectroscopy

Journal of Applied Physics ◽

10.1063/1.1467398 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6288 ◽

Author(s):

V. M. Donnelly ◽

M. J. Schabel

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distributions ◽

Inductively Coupled ◽

Spatially Resolved

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Determination of Non-Maxwellian Electron Energy Distributions in Low-Pressure Plasmas by Using the Optical Emission Spectroscopy and a Collisional-Radiative Model

Plasma Science and Technology ◽

10.1088/1009-0630/13/3/02 ◽

2011 ◽

Vol 13 (3) ◽

pp. 267-278 ◽

Author(s):

Ximing Zhu ◽

Yikang Pu

Keyword(s):

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Energy Distributions ◽

Collisional Radiative Model ◽

Radiative Model

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Langmuir probe diagnostics of electron energy distributions with optical emission spectroscopy in capacitively coupled rf discharge in nitrogen

Journal of Applied Physics ◽

10.1063/1.3664858 ◽

2011 ◽

Vol 110 (11) ◽

pp. 113303 ◽

Author(s):

E. Abdel-Fattah ◽

M. Bazavan ◽

H. Sugai

Keyword(s):

Electron Energy ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Rf Discharge ◽

Energy Distributions ◽

Capacitively Coupled ◽

Probe Diagnostics

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Form-Free Reconstruction of an Electron Energy Distribution Function from Optical Emission Spectroscopy

10.1063/1.2909110 ◽

2008 ◽

Author(s):

D. Dodt ◽

A. Dinklage ◽

R. Fischer ◽

K. Bartschat ◽

O. Zatsarinny ◽

...

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Experimental investigation of the electron energy distribution function (EEDF) by Thomson scattering and optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/45/47/475202 ◽

2012 ◽

Vol 45 (47) ◽

pp. 475202 ◽

Author(s):

E A D Carbone ◽

S Hübner ◽

M Jimenez-Diaz ◽

J M Palomares ◽

E Iordanova ◽

...

Keyword(s):

Experimental Investigation ◽

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Thomson Scattering ◽

Energy Distribution Function

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Determination of the electron energy distribution function via optical emission spectroscopy and a Langmuir probe in an ICP

Plasma Sources Science and Technology ◽

10.1088/0963-0252/17/3/035004 ◽

2008 ◽

Vol 17 (3) ◽

pp. 035004 ◽

Author(s):

N Bibinov ◽

H Halfmann ◽

P Awakowicz

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Langmuir Probe ◽

Electron Energy Distribution Function ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Energy Distribution Function

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Measurement of electron temperatures and electron energy distribution functions in dual frequency capacitively coupled CF4/O2 plasmas using trace rare gases optical emission spectroscopy

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.3179162 ◽

2009 ◽

Vol 27 (5) ◽

pp. 1159-1165 ◽

Author(s):

Zhiying Chen ◽

Vincent M. Donnelly ◽

Demetre J. Economou ◽

Lee Chen ◽

Merritt Funk ◽

...

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Distribution Functions ◽

Dual Frequency ◽

Capacitively Coupled ◽

Energy Distribution Functions

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The use of Langmuir probes and optical emission spectroscopy to measure electron energy distribution functions in RF-generated argon plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/20/7/002 ◽

1987 ◽

Vol 20 (7) ◽

pp. 820-831 ◽

Author(s):

T I Cox ◽

V G I Deshmukh ◽

D A O Hope ◽

A J Hydes ◽

N S J Braithwaite ◽

...

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Langmuir Probes ◽

Argon Plasmas ◽

Energy Distribution Functions

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Animal and vegetable fats and oils. Determination of trace elements by inductively coupled plasma optical emission spectroscopy (ICP-OES)

10.3403/30303050u ◽

2016 ◽

Keyword(s):

Trace Elements ◽

Inductively Coupled Plasma ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Fats And Oils ◽

Icp Oes ◽

Inductively Coupled ◽

Plasma Optical Emission Spectroscopy

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