Low temperature synthesis of α-Al2O3films by high-power plasma-assisted chemical vapour deposition
2010 ◽
Vol 43
(32)
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pp. 325202
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2015 ◽
Vol 324
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pp. 438-442
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2018 ◽
Vol 6
(7)
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pp. 3242-3248
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Keyword(s):
1996 ◽
Vol 166
(1-4)
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pp. 628-630
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2001 ◽
Vol 231
(1-2)
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pp. 242-247
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Keyword(s):
Keyword(s):
2010 ◽
Vol 43
(18)
◽
pp. 185102
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1992 ◽
pp. 204-210