Low-temperature synthesis of microcrystalline 3C-SiC film by high-pressure hydrogen-plasma-enhanced chemical transport
2011 ◽
Vol 44
(23)
◽
pp. 235202
◽
Keyword(s):
Sic Film
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Keyword(s):
Keyword(s):
2010 ◽
Vol 65
(8)
◽
pp. 1024-1032
◽
2010 ◽
Vol 31
(7)
◽
pp. 776-780
Keyword(s):