Modeling of Epitaxial Silicon Thin‐Film Growth on a Rotating Substrate in a Horizontal Single‐Wafer Reactor
1995 ◽
Vol 142
(12)
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pp. 4272-4278
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2001 ◽
Vol 34
(18)
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pp. 2782-2791
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1993 ◽
Vol 140
(11)
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pp. 3290-3293
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2014 ◽
Vol 401
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pp. 740-747
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Keyword(s):
1994 ◽
Vol 135
(1-2)
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pp. 246-252
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Keyword(s):
Keyword(s):
1992 ◽
Vol 31
(Part 1, No. 6B)
◽
pp. 1953-1957
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Keyword(s):