Modelling of plasma generation and thin film deposition by a non-thermal plasma jet at atmospheric pressure

2016 ◽  
Vol 49 (34) ◽  
pp. 345202 ◽  
Author(s):  
F Sigeneger ◽  
M M Becker ◽  
R Foest ◽  
D Loffhagen
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Atmospheric Pressure ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Plasma Generation ◽  
Thermal Plasma Jet ◽  
Non Thermal Plasma

Study of thin Film Formation From Silicon-Containing Precursors Produced by an RF Non-Thermal Plasma Jet at Atmospheric Pressure

2012 ◽  
Vol 52 (10) ◽  
pp. 872-880 ◽  
Author(s):  
J. Schäfer ◽  
R. Foest ◽  
F. Sigeneger ◽  
D. Loffhagen ◽  
K.-D. Weltmann ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Atmospheric Pressure ◽  
Film Formation ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Non Thermal Plasma ◽  
Thin Film Formation

Design, Construction and Characterization of AC Atmospheric Pressure Air Non-thermal Plasma Jet

2014 ◽  
Vol 33 (6) ◽  
pp. 627-633 ◽  
Author(s):  
K. M. Ahmed ◽  
T. M. Allam ◽  
H. A. El-sayed ◽  
H. M. Soliman ◽  
S. A. Ward ◽  
...  
Keyword(s):  
Thermal Plasma ◽  
Atmospheric Pressure ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Non Thermal Plasma ◽  
Design Construction

Thin‐film deposition by combining plasma jet with spark discharge source at atmospheric pressure

2020 ◽  
Vol 61 (3) ◽  
Author(s):  
Yerbolat A. Ussenov ◽  
Moldir T. Toktamyssova ◽  
Merlan K. Dosbolayev ◽  
Maratbek T. Gabdullin ◽  
Talgat T. Daniyarov ◽  
...  
Keyword(s):  
Thin Film ◽  
Atmospheric Pressure ◽  
Plasma Jet ◽  
Thin Film Deposition ◽  
Spark Discharge ◽  
Film Deposition ◽  
Discharge Source
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