Fabrication of High-Performance Thin-Film Transistors on Glass Substrate by Atmospheric Pressure Micro-Thermal-Plasma-Jet-Induced Lateral Crystallization Technique

2012 ◽  
Vol 51 (2S) ◽  
pp. 02BH05 ◽  
Author(s):  
Yuji Fujita ◽  
Shohei Hayashi ◽  
Seiichiro Higashi
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Glass Substrate ◽  
Atmospheric Pressure ◽  
Thin Film Transistors ◽  
High Performance ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Lateral Crystallization

Application of Thermal Plasma Jet Irradiation to Crystallization and Gate Insulator Improvement for High-Performance Thin-Film Transistor Fabrication

2011 ◽  
Vol 50 (3) ◽  
pp. 03CB10 ◽  
Author(s):  
Seiichiro Higashi ◽  
Shohei Hayashi ◽  
Yasuo Hiroshige ◽  
Yusuke Nishida ◽  
Hideki Murakami ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
High Performance ◽  
Thin Film Transistor ◽  
Plasma Jet ◽  
Gate Insulator ◽  
Thermal Plasma Jet ◽  
Transistor Fabrication

Study of thin Film Formation From Silicon-Containing Precursors Produced by an RF Non-Thermal Plasma Jet at Atmospheric Pressure

2012 ◽  
Vol 52 (10) ◽  
pp. 872-880 ◽  
Author(s):  
J. Schäfer ◽  
R. Foest ◽  
F. Sigeneger ◽  
D. Loffhagen ◽  
K.-D. Weltmann ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Atmospheric Pressure ◽  
Film Formation ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Non Thermal Plasma ◽  
Thin Film Formation

Characterization of Microcrystalline Silicon Thin Film Transistors Fabricated by Thermal Plasma Jet Crystallization Technique

2010 ◽  
Vol 49 (3) ◽  
pp. 03CA08 ◽  
Author(s):  
Seiichiro Higashi ◽  
Kenji Sugakawa ◽  
Hirotaka Kaku ◽  
Tatsuya Okada ◽  
Seiichi Miyazaki
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
Thin Film Transistors ◽  
Plasma Jet ◽  
Microcrystalline Silicon ◽  
Silicon Thin Film ◽  
Thermal Plasma Jet

Application of Thermal Plasma Jet Irradiation to Crystallization and Gate Insulator Improvement for High-Performance Thin-Film Transistor Fabrication

2011 ◽  
Vol 50 (3S) ◽  
pp. 03CB10 ◽  
Author(s):  
Seiichiro Higashi ◽  
Shohei Hayashi ◽  
Yasuo Hiroshige ◽  
Yusuke Nishida ◽  
Hideki Murakami ◽  
...  
Keyword(s):  
Thin Film ◽  
Thermal Plasma ◽  
High Performance ◽  
Thin Film Transistor ◽  
Plasma Jet ◽  
Gate Insulator ◽  
Thermal Plasma Jet ◽  
Transistor Fabrication
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