Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection

2011 ◽  
Vol 21 (11) ◽  
pp. 115018 ◽  
Author(s):  
Da Chen ◽  
Jing-jing Wang ◽  
Qi-xin Liu ◽  
Yan Xu ◽  
De-hua Li ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Hydrogen Detection ◽  
Highly Sensitive ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

Investigation of Liquid Sensor Using a Dual-Mode Thin Film Bulk Acoustic Resonator (FBAR) Combined with Au/Cr Layers

2011 ◽  
Vol 201-203 ◽  
pp. 700-703
Author(s):  
Wei Tsai Chang ◽  
Ying Chung Chen ◽  
Re Ching Lin ◽  
Kuo Sheng Kao ◽  
Jia Ming Jiang ◽  
...  
Keyword(s):  
Thin Film ◽  
High Sensitivity ◽  
Rf Magnetron Sputtering ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Dual Mode ◽  
Resonant Frequencies ◽  
Film Bulk Acoustic Resonator ◽  
Shear Modes ◽  
Film Bulk

This paper reports a dual-mode film bulk acoustic resonator (FBAR) device combined with Au/Cr layer to construct a liquid sensor. In order to obtain a liquid sensor with high sensitivity, the dual-mode FBAR with piezoelectric layer of ZnO thin film has been investigated. The dual-mode characteristics of FBAR appeared by off-axis deposition of ZnO thin film with the RF magnetron sputtering. The top and bottom electrodes consisted of a titanium (Ti) and a platinum (Pt) layers were deposited by dual-gun DC sputtering system. Owing to the chemical stability, the Pt layer is not only a perfect bottom electrode but also an etching stop layer. The gold layer (Au) is adopted for the formation of sensory area. In order to improve the adhesion between the Au layer and the Pt layer, a chromium (Cr) layer was deposited onto the backside cavity of the FBAR device before the Au layer was deposited by a DC sputter. The Au/Cr layer is used as the binding layer with analytes of DI water because of its hydrophile. The frequency response is measured using an HP8720 network analyzer and a CASCADE probe station. The resonant frequencies of longitude and shear modes in air appear at 2262.5 MHz and 1012.5MHz, whereas the resonant frequencies of longitude and shear modes in DI water are 2062.5 MHz and 955MHz, respectively.

Protein functionalized ZnO thin film bulk acoustic resonator as an odorant biosensor

2012 ◽  
Vol 163 (1) ◽  
pp. 242-246 ◽  
Author(s):  
Xiubo Zhao ◽  
Gregory M. Ashley ◽  
Luis Garcia-Gancedo ◽  
Hao Jin ◽  
Jikui Luo ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

scholarly journals Vibration optimization of ZnO thin film bulk acoustic resonator with ring electrodes

AIP Advances ◽  
2016 ◽  
Vol 6 (4) ◽  
pp. 045201 ◽  
Author(s):  
Zinan Zhao ◽  
Zhenghua Qian ◽  
Bin Wang
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

CMOS integrated ZnO thin film bulk acoustic resonator with Si3N4 susceptor layer for improved IR sensitivity

2017 ◽  
Author(s):  
Aida R. Colon-Berrios ◽  
Hassan Edrees ◽  
Christine McGinn ◽  
Marco Roberto Cavallari ◽  
Peter Kinget ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Resonator ◽  
Zno Thin Film ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk
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