Controlling surfaces in plasma processing: role of ions via molecular dynamics simulations of surface chemistry
2002 ◽
Vol 11
(3A)
◽
pp. A191-A195
◽
Keyword(s):
2006 ◽
Vol 110
(7)
◽
pp. 3323-3329
◽
2020 ◽
Keyword(s):
Keyword(s):
2005 ◽
Vol 88
(4)
◽
pp. 2442-2451
◽