Electron heating mechanisms in dual-frequency capacitive discharges
2007 ◽
Vol 16
(2)
◽
pp. 364-371
◽
2010 ◽
Vol 19
(4)
◽
pp. 045001
◽
D Ziegler
◽
J Trieschmann
◽
T Mussenbrock
◽
R P Brinkmann
◽
J Schulze
◽
...
2016 ◽
Vol 23
(5)
◽
pp. 053514
◽
2009 ◽
Vol 16
(2)
◽
pp. 023503
◽
D. Ziegler
◽
T. Mussenbrock
◽
R. P. Brinkmann
E. Schungel
◽
J. Schulze
◽
S. Mohr
◽
S. Iwashita
◽
U. Czarnetzki
2006 ◽
Vol 89
(23)
◽
pp. 231502
◽
M. M. Turner
◽
P. Chabert
2011 ◽
Vol 39
(11)
◽
pp. 2530-2531
Hyoung Cheol Kwon
◽
Sung Hee Lee
◽
Aman-Ur Rehman
◽
Jae Koo Lee
2006 ◽
Vol 48
(12B)
◽
pp. B231-B237
◽
P Chabert
◽
P Levif
◽
J-L Raimbault
◽
J-M Rax
◽
M M Turner
◽
...
Sanghoo Park
◽
Wonho Choe
◽
Se Youn Moon
◽
Jian Jun Shi
2013 ◽
Vol 46
(28)
◽
pp. 285203
◽
J. Schulze
◽
E. Schuengel
◽
A. Derzsi
◽
I. Korolov
◽
Z. Donko