Electron heating in multiple-frequency capacitive discharges
2006 ◽
Vol 48
(12B)
◽
pp. B231-B237
◽
2010 ◽
Vol 19
(4)
◽
pp. 045001
◽
Keyword(s):
2011 ◽
Vol 28
(7)
◽
pp. 075202
◽
Keyword(s):
2007 ◽
Vol 16
(2)
◽
pp. 364-371
◽
Keyword(s):