Electron heating mode transition induced by mixing radio frequency and ultrahigh frequency dual frequency powers in capacitive discharges

2016 ◽  
Vol 23 (5) ◽  
pp. 053514 ◽  
Author(s):  
B. B. Sahu ◽  
Jeon G. Han
Keyword(s):  
Radio Frequency ◽  
Ultrahigh Frequency ◽  
Mode Transition ◽  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges ◽  
Heating Mode

Effect of Electron Heating Mode on Charge-Up Damage in Dual-Frequency Capacitive Discharges

2011 ◽  
Vol 39 (11) ◽  
pp. 2530-2531
Author(s):  
Hyoung Cheol Kwon ◽  
Sung Hee Lee ◽  
Aman-Ur Rehman ◽  
Jae Koo Lee
Keyword(s):  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges ◽  
Heating Mode

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 ◽  
Vol 19 (4) ◽  
pp. 045001 ◽  
Author(s):  
D Ziegler ◽  
J Trieschmann ◽  
T Mussenbrock ◽  
R P Brinkmann ◽  
J Schulze ◽  
...  
Keyword(s):  
Relative Phase ◽  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges
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