scholarly journals Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure

2018 ◽  
Vol 8 (1) ◽  
Author(s):  
Sanghoo Park ◽  
Wonho Choe ◽  
Se Youn Moon ◽  
Jian Jun Shi
Keyword(s):  
Atmospheric Pressure ◽  
Dual Frequency ◽  
Capacitive Discharges

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 ◽  
Vol 19 (4) ◽  
pp. 045001 ◽  
Author(s):  
D Ziegler ◽  
J Trieschmann ◽  
T Mussenbrock ◽  
R P Brinkmann ◽  
J Schulze ◽  
...  
Keyword(s):  
Relative Phase ◽  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges

Effects of HF frequency on plasma characteristics in dual-frequency helium discharge at atmospheric pressure by fluid modeling

2018 ◽  
Vol 20 (11) ◽  
pp. 115402
Author(s):  
Yinan WANG ◽  
Shuaixing LI ◽  
Li WANG ◽  
Ying JIN ◽  
Yanhua ZHANG ◽  
...  
Keyword(s):  
Atmospheric Pressure ◽  
Dual Frequency ◽  
Fluid Modeling ◽  
Plasma Characteristics ◽  
Helium Discharge

The Influence of Ion Energy Distribution for Multiple Frequencies Driven

2013 ◽  
Vol 664 ◽  
pp. 947-953
Author(s):  
Zhu Wen Zhou ◽  
Yuan Sheng Wang ◽  
Bo Kong
Keyword(s):  
Integrated Circuit ◽  
Dual Frequency ◽  
Energy Distributions ◽  
Low Frequencies ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Multiple Frequencies ◽  
Ion Energy Distributions ◽  
Capacitive Discharges ◽  
Good Agreement

The voltages, resonant waves and frequencies how to influence on the ion energy distributions (IEDs) from multiple frequencies driven in capacitive discharges, it is important to analyze these phenomenon and mechanism in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. We focused on the function of the ion energy distributions under high and low frequencies (dual frequency) drive in capacitive discharges, we derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with these important data from public publish.

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