Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

2014 ◽  
Author(s):  
J. Schulze ◽  
E. Schuengel ◽  
A. Derzsi ◽  
I. Korolov ◽  
Z. Donko
Keyword(s):  
Electron Heating ◽  
And Control ◽  
Capacitive Discharges

Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

2013 ◽  
Vol 22 (6) ◽  
pp. 065009 ◽  
Author(s):  
A Derzsi ◽  
I Korolov ◽  
E Schüngel ◽  
Z Donkó ◽  
J Schulze
Keyword(s):  
Electron Heating ◽  
And Control ◽  
Capacitive Discharges

Electron heating in multiple-frequency capacitive discharges

2006 ◽  
Vol 48 (12B) ◽  
pp. B231-B237 ◽  
Author(s):  
P Chabert ◽  
P Levif ◽  
J-L Raimbault ◽  
J-M Rax ◽  
M M Turner ◽  
...  
Keyword(s):  
Multiple Frequency ◽  
Electron Heating ◽  
Capacitive Discharges

The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges

2010 ◽  
Vol 19 (4) ◽  
pp. 045001 ◽  
Author(s):  
D Ziegler ◽  
J Trieschmann ◽  
T Mussenbrock ◽  
R P Brinkmann ◽  
J Schulze ◽  
...  
Keyword(s):  
Relative Phase ◽  
Dual Frequency ◽  
Electron Heating ◽  
Capacitive Discharges
Sign in / Sign up

Export Citation Format

Share Document