Study of growth kinetics and behaviour of particles in a helium-silane RF plasma using laser diagnostic methods
1993 ◽
Vol 2
(1)
◽
pp. 35-39
◽
Keyword(s):
2006 ◽
Vol 178
(6)
◽
pp. 1165-1184
◽
1998 ◽
Vol 108
(22)
◽
pp. 9362-9370
◽
Keyword(s):
Keyword(s):