Influence of the field frequency on the nitrogen atom yield in the remote plasma of an high frequency discharge
1998 ◽
Vol 7
(4)
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pp. 550-556
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Keyword(s):
2019 ◽
Vol 9
(3)
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pp. 344-352
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Keyword(s):
1972 ◽
Vol 27
(7)
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pp. 301-307
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2021 ◽
Vol 36
(4)
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pp. 20-27