scholarly journals Accurate measurement of the piezoelectric coefficient of thin films by eliminating the substrate bending effect using spatial scanning laser vibrometry

2010 ◽  
Vol 19 (6) ◽  
pp. 065011 ◽  
Author(s):  
Glenn J T Leighton ◽  
Zhaorong Huang
2004 ◽  
Author(s):  
Benjamin J. Halkon ◽  
Steve J. Rothberg

2003 ◽  
Vol 42 (29) ◽  
pp. 5831 ◽  
Author(s):  
Lothar Zipser ◽  
Heinz Franke ◽  
Erik Olsson ◽  
Nils-Erik Molin ◽  
Mikael Sjödahl

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