High aspect ratio silicon nanowires control fibroblast adhesion and cytoskeleton organization

2017 ◽  
Vol 28 (15) ◽  
pp. 155102 ◽  
Author(s):  
Laura Andolfi ◽  
Anna Murello ◽  
Damiano Cassese ◽  
Jelena Ban ◽  
Simone Dal Zilio ◽  
...  
RSC Advances ◽  
2017 ◽  
Vol 7 (71) ◽  
pp. 45101-45106 ◽  
Author(s):  
Gangqiang Dong ◽  
Yurong Zhou ◽  
Hailong Zhang ◽  
Fengzhen Liu ◽  
Guangyi Li ◽  
...  

High aspect ratio silicon nanowires (SiNWs) prepared by metal-assisted chemical etching were passivated by using catalytic chemical vapor deposition (Cat-CVD).


2012 ◽  
Vol 1512 ◽  
Author(s):  
Jian-Wei Ho ◽  
Qixun Wee ◽  
Jarrett Dumond ◽  
Li Zhang ◽  
Keyan Zang ◽  
...  

ABSTRACTA combinatory approach of Step-and-Flash Imprint Lithography (SFIL) and Metal-Assisted Chemical Etching (MacEtch) was used to generate near perfectly-ordered, high aspect ratio silicon nanowires (SiNWs) on 4" silicon wafers. The ordering and shapes of SiNWs depends only on the SFIL nanoimprinting mould used, thereby enabling arbitary SiNW patterns not possible with nanosphere and interference lithography (IL) to be generated. Very densely packed SiNWs with periodicity finer than that permitted by conventional photolithography can be produced. The height of SiNWs is, in turn, controlled by the etching duration. However, it was found that very high aspect ratio SiNWs tend to be bent during processing. Hexagonal arrays of SiNW with circular and hexagonal cross-sections of dimensions 200nm and less were produced using pillar and pore patterned SFIL moulds. In summary, this approach allows highlyordered SiNWs to be fabricated on a wafer-level basis suitable for semiconductor device manufacturing.


2018 ◽  
Vol 195 ◽  
pp. 139-144 ◽  
Author(s):  
Bo Feng ◽  
Jianan Deng ◽  
Bingrui Lu ◽  
Chen Xu ◽  
Yiwen Wang ◽  
...  

2015 ◽  
Vol 26 (8) ◽  
pp. 085301 ◽  
Author(s):  
A Smyrnakis ◽  
E Almpanis ◽  
V Constantoudis ◽  
N Papanikolaou ◽  
E Gogolides

2009 ◽  
Vol 19 (15) ◽  
pp. 2495-2500 ◽  
Author(s):  
Shih-Wei Chang ◽  
Vivian P. Chuang ◽  
Steven T. Boles ◽  
Caroline A. Ross ◽  
Carl V. Thompson

2010 ◽  
Author(s):  
Hang Chen ◽  
Craig Keasler ◽  
Anna Swan ◽  
Ozgur Ozsun ◽  
P. M. Champion ◽  
...  

2016 ◽  
Vol 122 (2) ◽  
Author(s):  
Halldor Gudfinnur Svavarsson ◽  
Birgir Hrafn Hallgrimsson ◽  
Manoj Niraula ◽  
Kyu Jin Lee ◽  
Robert Magnusson

2013 ◽  
Vol 652-654 ◽  
pp. 654-658 ◽  
Author(s):  
Hsin Luen Tsai

Silicon nanowires with fine tip curvature and high aspect ratio are the promising alternative as the electron emitter to promote field electron emission characteristics. The fabrication of silicon nanowires based on the vapor-liquid-solid (VLS) mechanism was performed in the low pressure chemical vapor deposition chamber in the present work. The gold has its lower eutectic point than other materials and deposited on silicon wafer as the catalyst for silicon nanowire synthesis. The structural properties of the nanowires, including number density, size, aspect ratio and tapering geometry, were optimized by various experimental recipes. The results showed that the low turn-on filed of the nanowire was comparable with the published materials. The 1.2 V/μm low turn-on field was detected from the silicon nanowires which have high aspect ratio and tapered tip emitter when the silicon nanowires were synthesized under the reaction conditions at 620 °C grown for 60 minutes with silane and nitrogen flow rates at 100 SCCM.


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