scholarly journals N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction

2020 ◽  
Vol 29 (8) ◽  
pp. 085023 ◽  
Author(s):  
Miguel Jiménez-Redondo ◽  
Audrey Chatain ◽  
Olivier Guaitella ◽  
Guy Cernogora ◽  
Nathalie Carrasco ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Surface Interaction ◽  
Capacitively Coupled ◽  
Plasma Surface ◽  
Radio Frequency Discharges

scholarly journals Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 ◽  
Vol 127 (18) ◽  
pp. 181101 ◽  
Author(s):  
S. Wilczek ◽  
J. Schulze ◽  
R. P. Brinkmann ◽  
Z. Donkó ◽  
J. Trieschmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Electron Dynamics ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges

scholarly journals Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2020 ◽  
Vol 29 (2) ◽  
pp. 025019 ◽  
Author(s):  
Máté Vass ◽  
Sebastian Wilczek ◽  
Trevor Lafleur ◽  
Ralf Peter Brinkmann ◽  
Zoltán Donkó ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Power Absorption ◽  
Capacitively Coupled

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 ◽  
Vol 27 (12) ◽  
pp. 125010 ◽  
Author(s):  
S Wilczek ◽  
J Trieschmann ◽  
J Schulze ◽  
Z Donkó ◽  
R P Brinkmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges

Impact of ion energies in Ar/H2 capacitively coupled radio frequency discharges on PEALD processes of titanium films

2018 ◽  
Vol 350 ◽  
pp. 740-744 ◽  
Author(s):  
Shinya Iwashita ◽  
Kazuki Denpoh ◽  
Takamichi Kikuchi ◽  
Yusuke Suzuki ◽  
Yuichiro Wagatsuma ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Ion Energies ◽  
Radio Frequency Discharges

Field reversals in electrically asymmetric capacitively coupled radio-frequency discharges in hydrogen

2013 ◽  
Vol 46 (43) ◽  
pp. 435201 ◽  
Author(s):  
Sebastian Mohr ◽  
Edmund Schüngel ◽  
Julian Schulze ◽  
Uwe Czarnetzki
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges
Sign in / Sign up

Export Citation Format

Share Document