Electric field reversals resulting from voltage waveform tailoring in Ar/O2 capacitively coupled plasmas sustained in asymmetric systems

2021 ◽  
Author(s):  
Florian Krüger ◽  
Hyunjae Lee ◽  
Sang Ki Nam ◽  
Mark J Kushner
Keyword(s):  
Electric Field ◽  
Voltage Waveform ◽  
Capacitively Coupled ◽  
Coupled Plasmas

An overview of diagnostic methods of low-pressure capacitively coupled plasmas

2012 ◽  
Vol 521 ◽  
pp. 141-145 ◽  
Author(s):  
Yong-Xin Liu ◽  
Wei Jiang ◽  
Xiao-Song Li ◽  
Wen-Qi Lu ◽  
You-Nian Wang
Keyword(s):  
Low Pressure ◽  
Diagnostic Methods ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Impact of phase lag on uniformity in pulsed capacitively coupled plasmas

2011 ◽  
Vol 99 (2) ◽  
pp. 021501 ◽  
Author(s):  
Ankur Agarwal ◽  
Shahid Rauf ◽  
Ken Collins
Keyword(s):  
Phase Lag ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Effects of magnetic field on the secondary electron asymmetry effect in capacitively coupled plasmas

2021 ◽  
Vol 28 (12) ◽  
pp. 123505
Author(s):  
Shali Yang ◽  
Tianxiang Zhang ◽  
Hanlei Lin ◽  
Hao Wu ◽  
Qiang Zhang
Keyword(s):  
Magnetic Field ◽  
Secondary Electron ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Coupled Plasmas

Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

2021 ◽  
Vol 104 (4) ◽  
Author(s):  
Quan-Zhi Zhang ◽  
Jing-Yu Sun ◽  
Wen-Qi Lu ◽  
Julian Schulze ◽  
Yu-Qing Guo ◽  
...  
Keyword(s):  
Electron Cyclotron ◽  
Cyclotron Motion ◽  
Capacitively Coupled ◽  
Coupled Plasmas
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