The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH4/NH3/N2plasmas: Two-dimensional simulations

2013 ◽  
Vol 22 (4) ◽  
pp. 045204
Author(s):  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
Wei Jiang ◽  
Lin Yi
Keyword(s):  
Radio Frequency ◽  
Process Conditions ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Plasma Characteristic

Frequency effects in capacitively coupled radio‐frequency glow discharges: A comparison between experiments and a two‐dimensional fluid model

1994 ◽  
Vol 64 (14) ◽  
pp. 1780-1782 ◽  
Author(s):  
P. M. Meijer ◽  
J. D. P. Passchier ◽  
W. J. Goedheer ◽  
J. Bezemer ◽  
W. G. J. H. M. van Sark
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Frequency Effects ◽  
Glow Discharges

Modeling of a capacitively coupled radio-frequency methane plasma: Comparison between a one-dimensional and a two-dimensional fluid model

2002 ◽  
Vol 92 (5) ◽  
pp. 2290-2295 ◽  
Author(s):  
D. Herrebout ◽  
A. Bogaerts ◽  
M. Yan ◽  
R. Gijbels ◽  
W. Goedheer ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
One Dimensional

Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N2/O2

2018 ◽  
Vol 25 (9) ◽  
pp. 093501
Author(s):  
Wen-Zhu Jia ◽  
Rui-Qiang Liu ◽  
Xi-Feng Wang ◽  
Xiang-Mei Liu ◽  
Yuan-Hong Song ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Simulation ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

A two‐dimensional moment equations‐based analysis of radio frequency capacitively coupled discharges

1996 ◽  
Vol 80 (12) ◽  
pp. 7154-7156 ◽  
Author(s):  
M. Meyyappan ◽  
T. R. Govindan ◽  
J. P. Kreskovsky
Keyword(s):  
Radio Frequency ◽  
Two Dimensional ◽  
Moment Equations ◽  
Capacitively Coupled
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