Two-dimensional PIC–MCC simulations of a capacitively coupled radio frequency discharge in methane
2005 ◽
Vol 14
(2)
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pp. 209-218
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2005 ◽
Vol 33
(2)
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pp. 615-623
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2007 ◽
Vol 40
(22)
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pp. 7008-7018
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2017 ◽
Vol 15
(3)
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pp. 1700152
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Keyword(s):
2002 ◽
Vol 11
(4)
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pp. 448-465
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1991 ◽
Vol 19
(4)
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pp. 619-627
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2004 ◽
Vol 43
(2)
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pp. 795-799
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1996 ◽
Vol 51
(7)
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pp. 1089-1106
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