Parasitic effects of air-gap through-silicon vias in high-speed three-dimensional integrated circuits
Keyword(s):
Air Gap
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2015 ◽
Vol 42
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pp. 49-59
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2019 ◽
Vol 13
(10)
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pp. 1529-1535
2012 ◽
Vol 12
(2)
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pp. 225-232
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2013 ◽
Vol 7
(1)
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pp. 11-20
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Keyword(s):
2012 ◽
Vol 12
(3)
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pp. 582-582