scholarly journals Non-destructive compositional depth profile analysis by hard x-ray photoelectron spectroscopy

2008 ◽  
Vol 100 (1) ◽  
pp. 012042 ◽  
Author(s):  
J Rubio-Zuazo ◽  
G R Castro
Keyword(s):  
Depth Profile ◽  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
X Ray ◽  
Compositional Depth Profile ◽  
Non Destructive

X-Ray Photoelectron Spectroscopy Sputter Depth Profile Analysis of Spatially Controlled Microstructures in Conductive Polymer Films

1991 ◽  
Vol 63 (1) ◽  
pp. 60-65 ◽  
Author(s):  
Susan G. MacKay ◽  
Mohammad. Bakir ◽  
Inga H. Musselman ◽  
Thomas J. Meyer ◽  
Richard W. Linton
Keyword(s):  
Depth Profile ◽  
Polymer Films ◽  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Conductive Polymer ◽  
Depth Profile Analysis ◽  
X Ray

scholarly journals In-depth Profile Analysis in Metal/high-k Gate Stack Structures Studied by Synchrotron-radiation Photoelectron Spectroscopy

Hyomen Kagaku ◽  
2010 ◽  
Vol 31 (9) ◽  
pp. 441-447
Author(s):  
Satoshi TOYODA ◽  
Hiroyuki KAMADA ◽  
Hiroshi KUMIGASHIRA ◽  
Masaharu OSHIMA ◽  
Kunihiko IWAMOTO ◽  
...  
Keyword(s):  
Synchrotron Radiation ◽  
Depth Profile ◽  
Photoelectron Spectroscopy ◽  
Profile Analysis ◽  
Depth Profile Analysis ◽  
Gate Stack ◽  
High K
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