Effects of electrical conductivity of substrate materials on microstructure of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Journal of Physics Conference Series ◽

10.1088/1742-6596/417/1/012062 ◽

2013 ◽

Vol 417 ◽

pp. 012062 ◽

Author(s):

S Nakao ◽

T Sonoda

Keyword(s):

Electrical Conductivity ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.01ac04 ◽

2012 ◽

Vol 51 (1) ◽

pp. 01AC04 ◽

Author(s):

Setsuo Nakao ◽

Tetsuo Soga ◽

Tsutomu Sonoda ◽

Tokuhiro Asada ◽

Naoki Kishi

Keyword(s):

Electrical Properties ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Optical And Electrical Properties ◽

Nitrogen Doped ◽

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Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.01ac04 ◽

2012 ◽

Vol 51 (1S) ◽

pp. 01AC04 ◽

Author(s):

Setsuo Nakao ◽

Tetsuo Soga ◽

Tsutomu Sonoda ◽

Tokuhiro Asada ◽

Naoki Kishi

Keyword(s):

Electrical Properties ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Optical And Electrical Properties ◽

Nitrogen Doped ◽

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Effects of working pressure on the deposition of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2009.01.103 ◽

2009 ◽

Vol 267 (8-9) ◽

pp. 1684-1687 ◽

Author(s):

Setsuo Nakao

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Working Pressure ◽

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Preparation of silicon-doped diamond-like carbon films with electrical conductivity by reactive high-power impulse magnetron sputtering combined with a plasma-based ion implantation system

Diamond and Related Materials ◽

10.1016/j.diamond.2019.107635 ◽

2020 ◽

Vol 101 ◽

pp. 107635 ◽

Author(s):

Yuki Shibata ◽

Takashi Kimura ◽

Setsuo Nakao ◽

Kingo Azuma

Keyword(s):

Electrical Conductivity ◽

Ion Implantation ◽

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Conductive diamond-like carbon films prepared by high power pulsed magnetron sputtering with bipolar type plasma based ion implantation system

Diamond and Related Materials ◽

10.1016/j.diamond.2017.06.011 ◽

2017 ◽

Vol 77 ◽

pp. 122-130 ◽

Author(s):

Setsuo Nakao ◽

Takashi Kimura ◽

Taku Suyama ◽

Kingo Azuma

Keyword(s):

Ion Implantation ◽

Magnetron Sputtering ◽

Carbon Films ◽

Diamond Like Carbon ◽

Bipolar Type ◽

Pulsed Magnetron

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Wear test and Raman analysis of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Transactions of the Materials Research Society of Japan ◽

10.14723/tmrsj.36.333 ◽

2011 ◽

Vol 36 (3) ◽

pp. 333-336

Author(s):

S. Nakao ◽

N. Terayama ◽

S. Ueda ◽

D. Sasakura ◽

Y. Fujimaki ◽

...

Keyword(s):

Ion Implantation ◽

Wear Test ◽

Carbon Films ◽

Diamond Like Carbon ◽

Raman Analysis ◽

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Nitrogen implantation into diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2012.12.088 ◽

2013 ◽

Vol 307 ◽

pp. 333-339 ◽

Author(s):

Setsuo Nakao ◽

Atsushi Kinomura ◽

Tsutomu Sonoda

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Nitrogen Implantation ◽

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Microstructure of diamond-like carbon films prepared using acetylene and toluene by bipolar-type plasma based ion implantation

physica status solidi (c) ◽

10.1002/pssc.200778308 ◽

2008 ◽

Vol 5 (4) ◽

pp. 973-976 ◽

Author(s):

S. Nakao ◽

J. Choi ◽

T. Kato

Keyword(s):

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

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Deposition of Diamond-Like Carbon Films on Inner Wall Surfaces of Millimeter-Size-Diameter Steel Tubes by Plasma Source Ion Implantation

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2168829 ◽

2011 ◽

Vol 39 (11) ◽

pp. 3140-3143 ◽

Author(s):

K. Baba ◽

R. Hatada ◽

S. Flege ◽

W. Ensinger

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Carbon Films ◽

Diamond Like Carbon ◽

Steel Tubes ◽

Plasma Source Ion Implantation

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Characteristics and surface energy of silicon-doped diamond-like carbon films fabricated by plasma immersion ion implantation and deposition

Diamond and Related Materials ◽

10.1016/j.diamond.2005.09.042 ◽

2006 ◽

Vol 15 (9) ◽

pp. 1276-1281 ◽

Author(s):

G.J. Wan ◽

P. Yang ◽

Ricky K.Y. Fu ◽

Y.F. Mei ◽

T. Qiu ◽

...

Keyword(s):

Surface Energy ◽

Ion Implantation ◽

Carbon Films ◽

Diamond Like Carbon ◽

Plasma Immersion Ion Implantation ◽

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