Optical and Electrical Properties of Nitrogen-Doped Diamond-Like Carbon Films Prepared by a Bipolar-Type Plasma-Based Ion Implantation

2012 ◽  
Vol 51 (1) ◽  
pp. 01AC04 ◽  
Author(s):  
Setsuo Nakao ◽  
Tetsuo Soga ◽  
Tsutomu Sonoda ◽  
Tokuhiro Asada ◽  
Naoki Kishi
Keyword(s):  
Electrical Properties ◽  
Ion Implantation ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Optical And Electrical Properties ◽  
Nitrogen Doped ◽  
Bipolar Type

scholarly journals Wear test and Raman analysis of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

2011 ◽  
Vol 36 (3) ◽  
pp. 333-336
Author(s):  
S. Nakao ◽  
N. Terayama ◽  
S. Ueda ◽  
D. Sasakura ◽  
Y. Fujimaki ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Wear Test ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Raman Analysis ◽  
Bipolar Type
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