Physical properties and phase transition observed in vanadium oxide thin films deposited by RF magnetron sputtering

2019 ◽  
Vol 6 (5) ◽  
pp. 056415
Author(s):  
Dwight Acosta ◽  
G Chavez-Esquivel ◽  
Carlos Magaña ◽  
Francisco Hernández ◽  
A Pérez-Pacheco ◽  
...  
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Magnetron Sputtering ◽  
Physical Properties ◽  
Vanadium Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Vanadium oxide thin films prepared by RF magnetron sputtering method

2004 ◽  
Author(s):  
Zhishuan Li ◽  
Suntao Wu ◽  
Jing Li ◽  
Donghui Guo ◽  
Fuchun Xu
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Rf Magnetron Sputtering ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

Structure Characterization of W-Doped Vanadium Oxide Thin Films Prepared by Reactive Magnetron Sputtering

2013 ◽  
Vol 690-693 ◽  
pp. 1694-1697
Author(s):  
Shuang Chen ◽  
Li Fang Zhang ◽  
Shu Juan Xiao ◽  
Cui Zhi Dong
Keyword(s):  
Thin Films ◽  
Phase Transition ◽  
Magnetron Sputtering ◽  
Vanadium Oxide ◽  
Reactive Magnetron Sputtering ◽  
Structure Characterization ◽  
Root Mean Square Roughness ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films

W-doped Vanadium oxide thin films were prepared on the substrates of SiO2 glass, float glass and Si (100) by reactive magnetron sputtering after annealing in vacuum. The structure, morphology and phase transition were characterized by X-ray diffractometer, atomic force microscopy (AFM) and differential thermal analysis (DTA), respectively. The results show that, the major phase of W-doped films on SiO2 glass is VO2.Dopant reduce the phase transition temperature of VO2 thin films to 21.9°C. The root-mean-square roughness of the film increase for the longer deposition time.

A study of physical properties and gas-surface interaction of vanadium oxide thin films

1999 ◽  
Vol 349 (1-2) ◽  
pp. 254-259 ◽  
Author(s):  
R. Rella ◽  
P. Siciliano ◽  
A. Cricenti ◽  
R. Generosi ◽  
M. Girasole ◽  
...  
Keyword(s):  
Thin Films ◽  
Physical Properties ◽  
Vanadium Oxide ◽  
Surface Interaction ◽  
Oxide Thin Films ◽  
Vanadium Oxide Thin Films
Sign in / Sign up

Export Citation Format

Share Document