scholarly journals Laser-Driven Electron Lensing in Silicon Microstructures

2019 ◽  
Vol 122 (10) ◽  
Author(s):  
Dylan S. Black ◽  
Kenneth J. Leedle ◽  
Yu Miao ◽  
Uwe Niedermayer ◽  
Robert L. Byer ◽  
...  
Keyword(s):  
Silicon Microstructures

Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation

2011 ◽  
Vol 22 (1) ◽  
pp. 015015 ◽  
Author(s):  
S Azimi ◽  
M B H Breese ◽  
Z Y Dang ◽  
Y Yan ◽  
Y S Ow ◽  
...  
Keyword(s):  
Ion Irradiation ◽  
Three Dimensional ◽  
Silicon Microstructures

scholarly journals Effect of isopropanol on gold assisted chemical etching of silicon microstructures

2017 ◽  
Vol 177 ◽  
pp. 59-65 ◽  
Author(s):  
L. Romano ◽  
J. Vila-Comamala ◽  
K. Jefimovs ◽  
M. Stampanoni
Keyword(s):  
Chemical Etching ◽  
Silicon Microstructures

A defined system to allow skeletal muscle differentiation and subsequent integration with silicon microstructures

Biomaterials ◽  
2006 ◽  
Vol 27 (24) ◽  
pp. 4374-4380 ◽  
Author(s):  
Mainak Das ◽  
Cassie A. Gregory ◽  
Peter Molnar ◽  
Lisa M. Riedel ◽  
Kerry Wilson ◽  
...  
Keyword(s):  
Skeletal Muscle ◽  
Muscle Differentiation ◽  
Skeletal Muscle Differentiation ◽  
Silicon Microstructures ◽  
Subsequent Integration

Label-free optical detection of cells grown in 3D silicon microstructures

Lab on a Chip ◽  
2013 ◽  
Vol 13 (16) ◽  
pp. 3284 ◽  
Author(s):  
Sabina Merlo ◽  
Francesca Carpignano ◽  
Gloria Silva ◽  
Francesca Aredia ◽  
A. Ivana Scovassi ◽  
...  
Keyword(s):  
Optical Detection ◽  
Label Free ◽  
Silicon Microstructures

Thermal de-isolation of silicon microstructures in a plasma etching environment

2013 ◽  
Vol 23 (2) ◽  
pp. 025026 ◽  
Author(s):  
Yong-Seok Lee ◽  
Yun-Ho Jang ◽  
Yong-Kweon Kim ◽  
Jung-Mu Kim
Keyword(s):  
Plasma Etching ◽  
Silicon Microstructures

Mechanical Reliability of Silicon Microstructures

2021 ◽  
Author(s):  
Toshiyuki Tsuchiya
Keyword(s):  
High Performance ◽  
Measurement Data ◽  
Design Guidelines ◽  
Fatigue Properties ◽  
Mechanical Reliability ◽  
Effective Parameters ◽  
Micro Electro Mechanical Systems ◽  
Device Reliability ◽  
Silicon Microstructures ◽  
Silicon Based

Abstract In this article, an overview of the mechanical reliability of silicon microstructures for micro-electro-mechanical systems (MEMS) is given to clarify what we now know and what we still have to know about silicon as a high-performance mechanical material on the microscale. Focusing on the strength and fatigue properties of silicon, attempts to understand the reliability of silicon and to predict the device reliability of silicon-based microstructures are introduced. The effective parameters on the strength and the mechanism of fatigue failure are discussed with examples of measurement data to show the design guidelines for highly reliable silicon microstructures and devices.

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