Homogeneous Amorphization in High-Energy Ion Implanted Si
1997 ◽
Vol 78
(15)
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pp. 2980-2982
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1997 ◽
Vol 258-263
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pp. 587-592
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2000 ◽
Vol 52
(1)
◽
pp. 39-45
◽
2001 ◽
Vol 175-177
◽
pp. 647-651
◽
2020 ◽
Vol 53
(13)
◽
pp. 135304
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