Lattice-plane curvature and small-angle grain boundaries in SiC bulk crystals

SiC crystals grown by the physical vapour transport process along the [001] direction show a curvature of the crystal growth front in correspondence with the shape of the isotherms. A large radius for the curvature of the isotherms enhances the formation of an extended facet. Under the facet, the lattice planes are flat with a high crystal quality as expressed by rocking-curve half widths of 0.022°. In the non-faceted region, the lattice planes become bent, following the shape of the isotherms with a radius of typically 0.5 to 0.8 m and an increased rocking-curve half width of 0.3°. A reduction of the growth rate from 300 µm h−1to 70 µm h−1does not affect this behaviour significantly. The lattice-plane curvature and the development of the facet are predominantly affected by the shape of the isotherms. For crystals grown in the [015] direction, the lattice planes adjust only in a one-dimensional manner to the isotherms. In all cases, the lattice-plane curvature results from the formation of a high density of small-angle grain boundaries. They are generated by the condensation of dislocations with Burgers vectors in theabplane.