GIXSGUI: a MATLAB toolbox for grazing-incidence X-ray scattering data visualization and reduction, and indexing of buried three-dimensional periodic nanostructured films

2015 ◽  
Vol 48 (3) ◽  
pp. 917-926 ◽  
Author(s):  
Zhang Jiang
Keyword(s):  
Thin Films ◽  
Three Dimensional ◽  
Grazing Incidence ◽  
Surface Scattering ◽  
Scattering Data ◽  
Matlab Toolbox ◽  
X Ray ◽  
X Ray Scattering ◽  
Reduction Methods ◽  
Ray Scattering

GIXSGUIis a MATLAB toolbox that offers both a graphical user interface and script-based access to visualize and process grazing-incidence X-ray scattering data from nanostructures on surfaces and in thin films. It provides routine surface scattering data reduction methods such as geometric correction, one-dimensional intensity linecut, two-dimensional intensity reshapingetc. Three-dimensional indexing is also implemented to determine the space group and lattice parameters of buried organized nanoscopic structures in supported thin films.

scholarly journals Comprehensive synchrotron grazing-incidence X-ray scattering analysis of nanostructures in porous polymethylsilsesquioxane dielectric thin films

2013 ◽  
Vol 46 (2) ◽  
pp. 466-475 ◽  
Author(s):  
Yecheol Rho ◽  
Byungcheol Ahn ◽  
Jinhwan Yoon ◽  
Moonhor Ree
Keyword(s):  
Thin Films ◽  
Grazing Angle ◽  
Grazing Incidence ◽  
Scattering Data ◽  
Small Contribution ◽  
Dielectric Thin Films ◽  
Dielectric Thin Film ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

A complete grazing-incidence X-ray scattering (GIXS) formula has been derived for nanopores buried in a polymer dielectric thin film supported by a substrate. Using the full power of the scattering formula, GIXS data from nanoporous polymethylsilsesquioxane dielectric thin films, a model nanoporous system, have successfully been analysed. The nanopores were found to be spherical and to have a certain degree of size distribution but were randomly dispersed in the film. In the film, GIXS was confirmed to arise predominantlyviathe first scattering process in which the incident X-ray beam scatters without reflection; the other scattering processes and their contributions were significantly dependent on the grazing angle. This study also confirmed that GIXS scattering can be analysed using only independent scattering terms, but this simple approach can only provide structural parameters. The cross terms were found to make a relatively small contribution to the intensity of the overall scattering but were required for the complete characterization of the measured two-dimensional scattering data, in particular the extracted out-of-plane scattering data, and their inclusion in the analysis enabled film properties such as film thickness, critical angle (i.e.electron density), refractive index and the absorption term to be determined.

Evaluation on Pore Structures of Organosilicate Thin Films by Grazing Incidence Small-Angle X-ray Scattering

2009 ◽  
Vol 113 (38) ◽  
pp. 12623-12627 ◽  
Author(s):  
Hong-Ji Chen ◽  
Sheng-Ying Li ◽  
Xiao-Jun Liu ◽  
Rui-Peng Li ◽  
Detlef-M. Smilgies ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Pore Structures ◽  
Organosilicate Thin Films ◽  
Ray Scattering

Grazing-incidence X-ray scattering of lamellar thin films

2019 ◽  
Vol 52 (2) ◽  
pp. 247-251
Author(s):  
Detlef-M. Smilgies
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Small Molecules ◽  
Film Studies ◽  
Grazing Incidence ◽  
Semicrystalline Polymers ◽  
X Ray ◽  
X Ray Scattering ◽  
Incident Plane ◽  
Ray Scattering

Recently, surface and thin-film studies using area detectors have become prevalent. An important class of such systems are lamellar thin films formed by small molecules, liquid crystals or semicrystalline polymers. Frequently, the lamellae align more or less parallel to the substrate. Such structures can be easily discerned by their characteristic X-ray scattering close to the incident plane. This paper describes how such patterns can be simulated, in order to extract morphological information about the thin film.

In-Situ Grazing Incidence Small-Angle X-ray Scattering Studies on Nanopore Evolution in Low-kOrganosilicate Dielectric Thin Films

2005 ◽  
Vol 38 (8) ◽  
pp. 3395-3405 ◽  
Author(s):  
Byeongdu Lee ◽  
Jinhwan Yoon ◽  
Weontae Oh ◽  
Yongtaek Hwang ◽  
Kyuyoung Heo ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Dielectric Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

Synchrotron Grazing Incidence X-ray Scattering Study of the Morphological Structures in Thin Films of a Polymethacrylate Diblock Copolymer Bearing POSS Moieties

2010 ◽  
Vol 114 (24) ◽  
pp. 8033-8042 ◽  
Author(s):  
Sangwoo Jin ◽  
Tomoyasu Hirai ◽  
Byungcheol Ahn ◽  
Yecheol Rho ◽  
Kwang-Woo Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Diblock Copolymer ◽  
Grazing Incidence ◽  
X Ray ◽  
X Ray Scattering ◽  
Scattering Study ◽  
Ray Scattering

Determination of Strain Distributions in Aluminum Thin Films as a Function of Temperature by the use of Synchrotron Grazing Incidence X-Ray Scattering

1991 ◽  
Vol 239 ◽  
Author(s):  
Ramnath Venkatraman ◽  
Paul R. Besser ◽  
Sean Brennan ◽  
John C. Bravman
Keyword(s):  
Thin Films ◽  
Room Temperature ◽  
Grazing Incidence ◽  
Surface Relaxation ◽  
Line Broadening ◽  
X Ray ◽  
Relaxation Effects ◽  
X Ray Scattering ◽  
Ray Scattering

ABSTRACTWe have measured elastic strain distributions with depth as a function of temperature in Al thin films of various thicknesses on oxidized silicon using synchrotron grazing incidence X-ray scattering (GIXS). Disregarding minor surface relaxation effects that depend on the film thickness, it is shown that there are no gross strain gradients in these films in the range of temperatures (between room temperature and 400°C) considered. We also observe X-ray line broadening effects, suggesting an accumulation of dislocations on cooling the films, and their annealing out as the films are reheated.

scholarly journals Structure of Glancing Incidence Deposited TiO2 Thin Films as Revealed by Grazing Incidence Small-Angle X-ray Scattering

ChemPhysChem ◽  
2010 ◽  
Vol 11 (10) ◽  
pp. 2205-2208 ◽  
Author(s):  
Lola González-García ◽  
Angel Barranco ◽  
Adela Muñoz Páez ◽  
Agustín R. González-Elipe ◽  
Mari-Cruz García-Gutiérrez ◽  
...  
Keyword(s):  
Thin Films ◽  
Small Angle ◽  
Grazing Incidence ◽  
Tio2 Thin Films ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering
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