Analytical modeling of oxide breakup effect on base current in n/sup +/-polysilicon emitter bipolar devices

1992 ◽  
Vol 39 (12) ◽  
pp. 2797-2802 ◽  
Author(s):  
J.J. Sung ◽  
T.M. Liu ◽  
Y.O. Kim ◽  
T.-Y. Chiu







1988 ◽  
Vol 35 (11) ◽  
pp. 1902-1908 ◽  
Author(s):  
L.M. Castaner ◽  
P. Ashburn ◽  
L. Prat Vinas ◽  
G.R. Wolstenholme
Keyword(s):  


1997 ◽  
Vol 82 (5) ◽  
pp. 2671-2675 ◽  
Author(s):  
P. Llinares ◽  
D. Celi ◽  
O. Roux-dit-Buisson ◽  
G. Ghibaudo ◽  
J. A. Chroboczek


1996 ◽  
Vol 74 (S1) ◽  
pp. 172-176 ◽  
Author(s):  
V. Van ◽  
M. J. Deen ◽  
J. Kendall ◽  
D. S. Malhi ◽  
S. Voinigescu ◽  
...  

Five DC techniques of extracting the base and emitter resistances of polysilicon-emitter npn bipolar junction transistors (BJTs) are presented and compared. The five techniques include three previously published techniques and two new techniques, constant base current and IB–IE plane fitting. Application of the five methods to a 0.8 × 16 μm2 npn BJT shows that all but the method of impact ionization yield comparable Rc and Rbb values at high currents. The impact ionization method, which extracts Rc and Rbb in the impact ionization region and at low base currents, yields markedly different Rc and Rbb values, indicating that the values of the parasitic resistances depend on the current range over which the extraction is performed. Thus the choice of which method is best to use depends on the current range over which Rc and Rbb are to be measured, and the validity of the assumptions used in the method when applied to the device.



1996 ◽  
Vol 79 (6) ◽  
pp. 3330-3336 ◽  
Author(s):  
A. Mounib ◽  
G. Ghibaudo ◽  
F. Balestra ◽  
D. Pogany ◽  
A. Chantre ◽  
...  


1998 ◽  
Vol 523 ◽  
Author(s):  
C. D. Marsh ◽  
N. E. Moiseiwitsch ◽  
J. Schiz ◽  
G. R. Booker ◽  
P. Ashburn

AbstractThe role of fluorine (F) in the break-up of the native oxide and the regrowth of As doped poly-Si layers on unpatterned Si wafers and on patterned regions of Si device wafers at temperatures of 900°C to 1000°C are investigated by TEM and by the fabrication of npn poly-Si emitter bipolar devices. Results for unpatterned wafers with F show i) a 950°C dopant drive-in anneal causes oxide break-up and regrowth after a time suitable for the fabrication of devices, ii) a pre-anneal, before the As implant, further enhances the break-up and regrowth and iii) there is an optimum F dose of 5×1015/cm2. Based on these results poly-Si emitter bipolar devices were fabricated using F=5×1015/cm2, a pre-anneal and a 900°C As drive-in anneal. The results establish quantitatively the relationship between the interface structures and the specific emitter resistance, i.e. with no F there is no break-up or regrowth and the emitter resistance is high (114Ωμm2) while with F there is break-up and regrowth and the emitter resistance is low (17Ωμm2).





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