Dc characterization of lateral bipolar devices in standard CMOS technology: a new model for base current partitioning

1999 ◽  
Vol 43 (5) ◽  
pp. 883-889 ◽  
Author(s):  
F. Corsi ◽  
M. Di Ciano ◽  
C. Marzocca
Author(s):  
Satish Kodali ◽  
Chen Zhe ◽  
Chong Khiam Oh

Abstract Nanoprobing is one of the key characterization techniques for soft defect localization in SRAM. DC transistor performance metrics could be used to identify the root cause of the fail mode. One such case report where nanoprobing was applied to a wafer impacted by significant SRAM yield loss is presented in this paper where standard FIB cross-section on hard fail sites and top down delayered inspection did not reveal any obvious defects. The authors performed nanoprobing DC characterization measurements followed by capacitance-voltage (CV) measurements. Two probe CV measurement was then performed between the gate and drain of the device with source and bulk floating. The authors identified valuable process marginality at the gate to lightly doped drain overlap region. Physical characterization on an inline split wafer identified residual deposits on the BL contacts potentially blocking the implant. Enhanced cleans for resist removal was implemented as a fix for the fail mode.


Author(s):  
Yuk L. Tsang ◽  
Xiang D. Wang ◽  
Reyhan Ricklefs ◽  
Jason Goertz

Abstract In this paper, we report a transistor model that has successfully led to the identification of a non visual defect. This model was based on detailed electrical characterization of a MOS NFET exhibiting a threshold voltage (Vt) of just about 40mv lower than normal. This small Vt delta was based on standard graphical extrapolation method in the usual linear Id-Vg plots. We observed, using a semilog plot, two slopes in the Id-Vg curves with Vt delta magnified significantly in the subthreshold region. The two slopes were attributed to two transistors in parallel with different Vts. We further found that one of the parallel transistors had short channel effect due to a punch-through mechanism. It was proposed and ultimately confirmed the cause was due to a dopant defect using scanning capacitance microscopy (SCM) technique.


Author(s):  
Jixin Chen ◽  
Weitian Liu ◽  
Pinpin Yan ◽  
Chenwei Jia ◽  
Debing Hou ◽  
...  

2011 ◽  
Vol 60 (7) ◽  
pp. 2191-2194 ◽  
Author(s):  
Gert Rietveld ◽  
J. H. N. van der Beek ◽  
Ernest Houtzager

2008 ◽  
Vol 19 (3) ◽  
pp. 563-575 ◽  
Author(s):  
Alexandre Croquelois ◽  
Fabienne Giuliani ◽  
Christine Savary ◽  
Michel Kielar ◽  
Clotilde Amiot ◽  
...  

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