Kinematical properties and optimal design of 3-DOF precision positioning stage

2012 ◽  
Vol 20 (12) ◽  
pp. 2686-2695 ◽  
Author(s):  
胡俊峰 HU Jun-feng ◽  
张宪民 ZHANG Xian-min
Keyword(s):  
Optimal Design ◽  
Precision Positioning ◽  
Positioning Stage

Comparison Between Three Tuning Methods of PID Control for High Precision Positioning Stage

MAPAN ◽  
2014 ◽  
Vol 30 (1) ◽  
pp. 65-70 ◽  
Author(s):  
Rajat Sen ◽  
Chinmoy Pati ◽  
Samik Dutta ◽  
Ranjan Sen
Keyword(s):  
High Precision ◽  
Pid Control ◽  
Precision Positioning ◽  
Positioning Stage ◽  
Tuning Methods

Thermal Error Modeling of Precision Positioning Stage

2013 ◽  
Vol 694-697 ◽  
pp. 767-770
Author(s):  
Jing Shu Wang ◽  
Ming Chi Feng
Keyword(s):  
Thermal Deformation ◽  
Thermal Error ◽  
Error Modeling ◽  
Precision Positioning ◽  
Third Order ◽  
Element Analysis ◽  
The Finite Element Analysis ◽  
Positioning Stage ◽  
Order Polynomial ◽  
The Relationship

As the thermal deformation significantly impacts the accuracy of precision positioning stage, it is necessary to realize the thermal error. The thermal deformation of the positioning stage is simulated by the finite element analysis. The relationship between the temperature variation and thermal error is fitted third-order polynomial function whose parameters are determined by genetic algorithm neural network (GANN). The operators of the GANN are optimized through a parametric study. The results show that the model can describe the relationship between the temperature and thermal deformation well.

A Novel Trans-Scale Precision Positioning Stage Based on the Stick-Slip Effect

2012 ◽  
Vol 2 (2) ◽  
pp. 1-14 ◽  
Author(s):  
Bowen Zhong ◽  
Liguo Chen ◽  
Zhenhua Wang ◽  
Lining Sun
Keyword(s):  
Friction Model ◽  
Slip Effect ◽  
Precision Positioning ◽  
Stick Slip ◽  
Kinematics Model ◽  
Lugre Friction Model ◽  
Positioning Stage ◽  
Simulation Results ◽  
Relationship Of ◽  
The Relationship

This article focuses on developing a novel trans-scale precision positioning stage based on the stick-slip effect. The stick-slip effect is introduced and the rigid kinematics model of the stick-slip driving is established. The forward and return displacement equations of each step of the stick-slip driving are deduced. The relationship of return displacement and the acceleration produced by friction are obtained according to displacement equations. Combining with LuGre friction model, the flexible dynamics model of the stick-slip driving is established and simulated by using Simulink software. Simulation results show that the backward displacement will reduce with the acceleration of the slider produced by dynamic friction force, the rigid kinematics model is also verified by simulation results which are explained in further detail in the article.

Realtime in-plane displacements tracking of the precision positioning stage based on computer micro-vision

2019 ◽  
Vol 124 ◽  
pp. 111-123 ◽  
Author(s):  
Hai Li ◽  
Benliang Zhu ◽  
Zhong Chen ◽  
Xianmin Zhang
Keyword(s):  
Precision Positioning ◽  
Positioning Stage

Development and control of a two DOF linear–angular precision positioning stage

Mechatronics ◽  
2015 ◽  
Vol 32 ◽  
pp. 34-43 ◽  
Author(s):  
Leon Clark ◽  
Bijan Shirinzadeh ◽  
Umesh Bhagat ◽  
Julian Smith ◽  
Yongmin Zhong
Keyword(s):  
Precision Positioning ◽  
Positioning Stage ◽  
And Control
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