A digital readout technique for capacitive sensor applications

10.1109/4.348 ◽  
1988 ◽  
Vol 23 (4) ◽  
pp. 972-977 ◽  
Author(s):  
J.T. Kung ◽  
H.-S. Lee ◽  
R.T. Howe
Sensors ◽  
2021 ◽  
Vol 21 (17) ◽  
pp. 5958
Author(s):  
Andrea G. Martinez-Lopez ◽  
David E. Guzmán-Caballero ◽  
Israel Mejia ◽  
Julio C. Tinoco

The development of silicon-based sensor devices has enabled the possibility to pursue novel integrated smart sensor technologies. Under this scenario, capacitive sensor devices are one viable option for implementing different kinds of applications. In this paper, an interdigitated coplanar capacitive device fabricated over a silicon substrate is presented and its potential use as liquid sensor is demonstrated. Additionally, a detailed capacitance model, which includes the parasitic capacitances introduced by the silicon substrate, was developed. The capacitance model has been theoretically validated through finite-element simulations as well as experimentally by comparison with fabricated devices. A polydimethylsiloxane mold has been fabricated and bonded to the sensor device with the aim of defining a cavity to collect the liquid sample into the device’s active region. The active capacitance component correlates to the electric field coupling between adjacent metal lines. Therefore, any change to the dielectric constant of the medium above the coplanar metal lines will produce a change to the device capacitance. Finally, the main guidelines for device performance improvement are depicted.


Sensors ◽  
2021 ◽  
Vol 21 (4) ◽  
pp. 1119
Author(s):  
Yun Xia ◽  
Hao Gu ◽  
Lei Xu ◽  
Xiao Dong Chen ◽  
Tim V. Kirk

Porous polymer dielectric materials have been developed to increase the sensitivity of capacitive pressure sensors, so that they might expand capacitive sensor use, and promote the realization of the advantages of this class of sensor in further fields. However, their use has not been demonstrated in physiological monitoring applications such as respiration monitoring and body position detection during sleep; an area in need of unmet medical attention for conditions such as sleep apnea. Here, we develop and characterize a sensor comprised of a poly dimethylsiloxane (PDMS) sponge dielectric layer, and PDMS/carbon black (CB) blend electrode layers, with suitable compliance and sensitivity for integration in mattresses, pillows, and athletic shoe insoles. With relatively high pressure sensitivity (~0.1 kPa−1) and mechanical robustness, this sensor was able to fulfill a wide variety of roles, including athletic monitoring in an impact mechanics scenario, by recording heel pressure during running and walking, and physiological monitoring, by detecting head position and respiration of a subject lying on a pad and pillow. The sensor detected considerably greater relative signal changes than those reported in recent capacitive sensor studies for heel pressure, and for a comparably minimal, resistive sensor during respiration, in line with its enhanced sensitivity.


2013 ◽  
Vol 325-326 ◽  
pp. 796-799
Author(s):  
Xiao Jing Shi ◽  
Chong Wei Zheng ◽  
Han Li ◽  
Xiao Luo Jiang

An approach providing a digital output linearly proportional to capacitance difference for capacitive pressure sensor is presented. Based on sigma-delta (ΣΔ) technique, the structure is insensitive to circuit imperfections and component mismatch, permitting the realization of digitized capacitive sensor readout with good accuracy. Analysis shows that a resolution as high as 20 bits is achievable. Simulation results are given to confirm the effectiveness.


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