Formation of source and drain regions for a-Si:H thin-film transistors by low-energy ion doping technique

1988 ◽  
Vol 9 (2) ◽  
pp. 90-93 ◽  
Author(s):  
A. Yoshida ◽  
K. Setsune ◽  
T. Hirao
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Low Energy ◽  
Ion Doping ◽  
Doping Technique

Fabrication of a-Si:H Thin Film Transistors on 4-inch Glass Substrates by a Large Area Ion Doping Technique

1991 ◽  
Vol 30 (Part 2, No. 1A) ◽  
pp. L67-L69 ◽  
Author(s):  
Akihisa Yoshida ◽  
Masaaki Nukayama ◽  
Yasunori Andoh ◽  
Masatoshi Kitagawa ◽  
Takashi Hirao
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Large Area ◽  
Glass Substrates ◽  
Ion Doping ◽  
Doping Technique

Stable p-channel polysilicon thin film transistors fabricated by laser doping technique

2005 ◽  
Vol 487 (1-2) ◽  
pp. 232-236 ◽  
Author(s):  
A. Di Gaspare ◽  
L. Mariucci ◽  
A. Pecora ◽  
G. Fortunato
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Laser Doping ◽  
Doping Technique

Polycrystalline In–Ga–O Thin-Film Transistors Coupled With a Nitrogen Doping Technique for High-Performance UV Detectors

2020 ◽  
Vol 67 (1) ◽  
pp. 140-145
Author(s):  
Yen-Chi Cheng ◽  
Sheng-Po Chang ◽  
Ih-Chin Chen ◽  
Yen-Lin Tsai ◽  
Tien-Hung Cheng ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Nitrogen Doping ◽  
Uv Detectors ◽  
Doping Technique

Visible Light and Low-Energy UV Effects on Organic Thin-Film Transistors

2012 ◽  
Vol 59 (5) ◽  
pp. 1501-1509 ◽  
Author(s):  
Nicola Wrachien ◽  
Andrea Cester ◽  
Daniele Bari ◽  
Ján Jakabovic ◽  
Jaroslav Kovac ◽  
...  
Keyword(s):  
Thin Film ◽  
Visible Light ◽  
Thin Film Transistors ◽  
Organic Thin Film Transistors ◽  
Low Energy ◽  
Organic Thin Film

Low-energy UV effects on Organic Thin-Film-Transistors

2011 ◽  
Author(s):  
N. Wrachien ◽  
A. Cester ◽  
D. Bari ◽  
G. Meneghesso ◽  
J. Kovac ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Organic Thin Film Transistors ◽  
Low Energy ◽  
Organic Thin Film

Hydrogen Implantation Damage in Polycrystalline Silicon Thin Film Transistors Caused by Ion Doping

2002 ◽  
Vol 41 (Part 1, No. 3A) ◽  
pp. 1259-1264 ◽  
Author(s):  
Mamoru Furuta ◽  
Hiroshi Satani ◽  
Toshiaki Terashita ◽  
Tatsuhiko Tamura ◽  
Yuji Tsuchihashi
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Polycrystalline Silicon ◽  
Silicon Thin Film ◽  
Implantation Damage ◽  
Ion Doping ◽  
Hydrogen Implantation
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