Stable p-channel polysilicon thin film transistors fabricated by laser doping technique

2005 ◽  
Vol 487 (1-2) ◽  
pp. 232-236 ◽  
Author(s):  
A. Di Gaspare ◽  
L. Mariucci ◽  
A. Pecora ◽  
G. Fortunato
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Laser Doping ◽  
Doping Technique

Polycrystalline In–Ga–O Thin-Film Transistors Coupled With a Nitrogen Doping Technique for High-Performance UV Detectors

2020 ◽  
Vol 67 (1) ◽  
pp. 140-145
Author(s):  
Yen-Chi Cheng ◽  
Sheng-Po Chang ◽  
Ih-Chin Chen ◽  
Yen-Lin Tsai ◽  
Tien-Hung Cheng ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
High Performance ◽  
Nitrogen Doping ◽  
Uv Detectors ◽  
Doping Technique

Low-Temperature Polysilicon Thin Film Transistors by Non-Mass-Separated Ion Flux Doping Technique

1990 ◽  
Vol 29 (Part 2, No. 12) ◽  
pp. L2377-L2379 ◽  
Author(s):  
Kunio Masumo ◽  
Masaya Kunigita ◽  
Satoshi Takafuji ◽  
Nobuhiro Nakamura ◽  
Atsushi Iwasaki ◽  
...  
Keyword(s):  
Thin Film ◽  
Low Temperature ◽  
Thin Film Transistors ◽  
Ion Flux ◽  
Doping Technique

scholarly journals Fabrication of CMOS Invertors in Si Thin-Film-Transistors by Laser Doping Using a Chemical Solution Coating

2020 ◽  
Vol 8 ◽  
pp. 27-32
Author(s):  
Kaname Imokawa ◽  
Takayuki Kurashige ◽  
Akira Suwa ◽  
Daisuke Nakamura ◽  
Taizoh Sadoh ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Chemical Solution ◽  
Laser Doping ◽  
Si Thin Film

Fabrication of a-Si:H Thin Film Transistors on 4-inch Glass Substrates by a Large Area Ion Doping Technique

1991 ◽  
Vol 30 (Part 2, No. 1A) ◽  
pp. L67-L69 ◽  
Author(s):  
Akihisa Yoshida ◽  
Masaaki Nukayama ◽  
Yasunori Andoh ◽  
Masatoshi Kitagawa ◽  
Takashi Hirao
Keyword(s):  
Thin Film ◽  
Thin Film Transistors ◽  
Large Area ◽  
Glass Substrates ◽  
Ion Doping ◽  
Doping Technique
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