A new technique for measuring the mechanical properties of thin films

1997 ◽  
Vol 6 (3) ◽  
pp. 193-199 ◽  
Author(s):  
W.N. Sharpe ◽  
B. Yuan ◽  
R.L. Edwards
1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.


Author(s):  
O. Knotek ◽  
B. Bosserhoff ◽  
A. Schrey ◽  
T. Leyendecker ◽  
O. Lemmer ◽  
...  

1998 ◽  
Vol 37 (4-5) ◽  
pp. 211-214
Author(s):  
C.M. Lopatin ◽  
T.L. Alford ◽  
V.B. Pizziconi ◽  
T. Laursen

1997 ◽  
Vol 505 ◽  
Author(s):  
D. Josell ◽  
W. C. Carter

ABSTRACTExperiments utilizing the creep properties of multilayer thin films to determine interfacial free energies are presented with essential theory. A new technique utilizing tubular multilayer foils is then described.


1989 ◽  
Vol 136 (5) ◽  
pp. 1566-1568 ◽  
Author(s):  
Keith E. Crowe ◽  
Rosemary L. Smith

1981 ◽  
Vol 16 (1) ◽  
pp. 11-14 ◽  
Author(s):  
N. Romeo ◽  
V. Canevari ◽  
G. Sberveglieri ◽  
A. Tosi ◽  
A. Camanzi

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