Quality factor enhancement of an Atomic Force Microscope micro-cantilever using piezoelectric shunt control

2012 ◽  
Author(s):  
Matthew W. Fairbairn ◽  
S. O. Reza Moheimani
Keyword(s):  
Atomic Force Microscope ◽  
Quality Factor ◽  
Atomic Force ◽  
Micro Cantilever ◽  
Shunt Control ◽  
Piezoelectric Shunt

Micro-Cantilever Based Metrology Tool for Flow Characterization of Liquid and Gaseous Micro/Nanojets

2005 ◽  
Author(s):  
Jungchul Lee ◽  
Kianoush Naeli ◽  
Hanif Hunter ◽  
John Berg ◽  
Tanya Wright ◽  
...  
Keyword(s):  
Heat Flux ◽  
Atomic Force Microscope ◽  
Temporal Resolution ◽  
Cantilever Sensors ◽  
Atomic Force ◽  
Flow Characterization ◽  
Local Measurements ◽  
Micro Cantilever ◽  
Tools And Techniques

This paper reports the development of MEMS metrology tools to characterize liquid and gaseous jets ejected from micro/nanofabricated nozzles. To date few highly local measurements have been made on micro/nanojets, due in part to the lack of characterization tools and techniques to investigate their characteristics. Atomic force microscope cantilevers are well-suited for interrogating these flows due to their high spatial and temporal resolution. In this work, cantilever sensors with either integrated heating elements or piezoresistive elements have been fabricated to measure thrust, velocity, and heat flux characteristics of micro/nanojets.

Increasing the Image Contrast of Atomic Force Microscope by Using Improved Rectangular Micro Cantilever

2011 ◽  
Vol 110-116 ◽  
pp. 4888-4892
Author(s):  
Ali Sadeghi
Keyword(s):  
Atomic Force Microscope ◽  
Contact Stiffness ◽  
Beam Theory ◽  
Flexural Vibration ◽  
Sample Surface ◽  
Limited Range ◽  
Image Contrast ◽  
Atomic Force ◽  
Afm Cantilever ◽  
Micro Cantilever

The resonant frequency of flexural vibrations for an atomic force microscope (AFM) cantilever has been investigated using the Euler-Bernoulli beam theory. The results show that for flexural vibration the frequency is sensitive to the contact position, the first frequency is sensitive only to the lower contact stiffness, but high order modes are sensitive in a larger range of contact stiffness. By increasing the height H, for a limited range of contact stiffness the sensitivity to the contact stiffness increases. This sensitivity controls the image contrast, or image quality. Furthermore, by increasing the angle between the cantilever and sample surface, the frequency decreases.

Influence of squeeze film damping on quality factor in tapping mode atomic force microscope

2021 ◽  
Vol 491 ◽  
pp. 115720
Author(s):  
Zheng Wei ◽  
Jing Liu ◽  
Xiaoting Zheng ◽  
Yan Sun ◽  
Ruihua Wei
Keyword(s):  
Atomic Force Microscope ◽  
Quality Factor ◽  
Squeeze Film ◽  
Tapping Mode ◽  
Atomic Force ◽  
Squeeze Film Damping
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