Robust tracking of nanopositioning stages using sliding mode control with a PID sliding surface
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2013 ◽
Vol 7
(2)
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pp. 226-241
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2010 ◽
Vol 18
(4)
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pp. 798-810
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2011 ◽
Vol 1
(4)
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pp. 447
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2017 ◽
Vol 354
(15)
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pp. 6463-6502
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2012 ◽
Vol 2
(1)
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pp. 107-13
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