Determination of Secondary-Ions Yield in SIMS Depth Profiling of Si, Mg, and C Ions Implanted Gan Epitaxial Layers

Author(s):  
M. Tapajna ◽  
A. Vincze ◽  
P. Noga ◽  
J. Dobrovodsky ◽  
A. Svagatova ◽  
...  
The Analyst ◽  
2016 ◽  
Vol 141 (16) ◽  
pp. 4893-4901 ◽  
Author(s):  
P. D. Rakowska ◽  
M. P. Seah ◽  
J.-L. Vorng ◽  
R. Havelund ◽  
I. S. Gilmore

Comparison of C60+(+) and Arn+ as sputtering ions for SIMS depth profiling of cholesterol thin films.


2007 ◽  
Vol 39 (11) ◽  
pp. 898-901 ◽  
Author(s):  
R. J. H. Morris ◽  
M. G. Dowsett ◽  
S. H. Dalal ◽  
D. L. Baptista ◽  
K. B. K. Teo ◽  
...  

2014 ◽  
Vol 46 (S1) ◽  
pp. 341-343
Author(s):  
Tae Woon Kim ◽  
Hyun Jeong Baek ◽  
Jong Shik Jang ◽  
Seung Mi Lee ◽  
Kyung Joong Kim

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